Hybrid Micromachining and Microfabrication Technologies Principles, Varieties and Applications

The book aims to provide a thorough understanding of numerous advanced hybrid micromachining and microfabrication techniques as well as future directions, providing researchers and engineers who work in hybrid micromachining with a much-appreciated orientation.

The book is dedicated to advanced hybrid micromachining and microfabrication technologies by detailing principals, techniques, processes, conditions, research advances, research challenges, and opportunities for various types of advanced hybrid micromachining and microfabrication. It discusses the mechanisms of material removal supported by experimental validation. Constructional features of hybrid micromachining setup suitable for industrial micromachining applications are explained. Separate chapters are devoted to different advanced hybrid micromachining and microfabrication to design and development of micro-tools, which is one of the most vital components in advanced hybrid micromachining, and which can also be used for various micro and nano applications. Power supply, and other major factors which influence advanced hybrid micromachining processes, are covered and research findings concerning the improvement of machining accuracy and efficiency are reported.

Audience

Mechanical, production, manufacturing, and automation industry engineers as well as researchers and (post) graduate students in the same disciplines.

Sandip Kunar, PhD, is an assistant professor in the Department of Mechanical Engineering, Aditya Engineering College, India. His research interests include non-conventional machining processes, micromachining processes, advanced manufacturing technology, and industrial engineering. He has published more than 50 research papers in various international journals and conferences as well as two patents.

Golam Kibria, PhD, is an assistant professor in the Department of Mechanical Engineering at Aliah University, Kolkata, India. He has worked as Senior Research Fellow (SRF) in the Council of Scientific & Industrial Research (CSIR) and his research interests include non-conventional machining processes, micromachining, and advanced manufacturing and forming technology.

Prasenjit Chatterjee, PhD, is a full professor of Mechanical Engineering and Dean (Research and Consultancy) at MCKV Institute of Engineering, West Bengal, India. He has more than 120 research papers in various international journals and peer-reviewed conferences. He has authored and edited over 22 books on intelligent decision-making, fuzzy computing, supply chain management, optimization techniques, risk management, and sustainability modeling. Dr. Chatterjee is one of the developers of a new multiple-criteria decision-making method called Measurement of Alternatives and Ranking according to Compromise Solution (MARCOS).

Asma Perveen, PhD, is an assistant professor in the Mechanical & Aerospace Engineering Department at Nazarbayev University, Kazakhstan. She earned her PhD from the National University of Singapore and worked as a research scientist at the Singapore Institute of Manufacturing Technology for over two years. Her research interests are in EDM, hybrid machining processes, additive manufacturing, polymer extrusion, and non-conventional machining processes.

Preface xv

Acknowledgement xix

1 Overview of Hybrid Micromachining and Microfabrication Techniques 1
Sandip Kunar, Akhilesh Kumar Singh, Devarapalli Raviteja, Golam Kibria, Prasenjit Chatterjee, Asma Perveen and Norfazillah Talib

1.1 Introduction 2

1.2 Classification of Hybrid Micromachining and Microfabrication Techniques 3

1.2.1 Compound Processes 4

1.2.2 Methods Aided by Various Energy Sources 6

1.2.3 Processing Using a Hybrid Tool 9

1.3 Challenges in Hybrid Micromachining 9

1.4 Conclusions 10

1.5 Future Research Opportunities 11

References 11

2 A Review on Experimental Studies in Electrochemical Discharge Machining 17
Pravin Pawar, Amaresh Kumar and Raj Ballav

2.1 Introduction 17

2.2 Historical Background 18

2.3 Principle of Electrochemical Discharge Machining Process 20

2.4 Basic Mechanism of Electrochemical Discharge Machining Process 20

2.5 Application of ECDM Process 23

2.6 Literature Review on ECDM 23

2.6.1 Literature Review on Theoretical Modeling 23

2.6.2 Literature Review on Internal Behavioral Studies 27

2.6.3 Literature Review on Design of ECDM 30

2.6.4 Literature Review on Workpiece Materials Used in ECDM 33

2.6.5 Literature Review on Tooling Materials and Its Design in ECDM 36

2.6.6 Literature Review on Electrolyte Chemicals Used in ECDM 39

2.6.7 Literature Review on Optimization Techniques Used in ECDM 42

2.7 Conclusion 87

Acknowledgments 87

References 87

3 Laser-Assisted Micromilling 101
Asma Perveen, Sandip Kunar, Golam Kibria and Prasenjit Chatterjee

3.1 Introduction 102

3.2 Laser-Assisted Micromilling 103

3.2.1 Laser-Assisted Micromilling of Steel Alloys 103

3.2.2 Laser-Assisted Micromilling of Titanium Alloys 105

3.2.3 Laser-Assisted Micromilling of Ni Alloys 108

3.2.4 Laser-Assisted Micromilling of Cementite Carbide 109

3.2.5 Laser-Assisted Micromilling of Ceramics 110

3.3 Conclusion 111

References 112

4 Ultrasonic-Assisted Electrochemical Micromachining 115
Sandip Kunar, Itha Veeranjaneyulu, S. Rama Sree, Asma Perveen, Norfazillah Talib, Sreenivasa Reddy Medapati and K.V.S.R. Murthy

4.1 Introduction 116

4.2 Ultrasonic Effect 117

4.2.1 Pumping Effect 117

4.2.2 Cavitation Effect 117

4.3 Experimental Procedure 117

4.4 Results and Discussion 118

4.4.1 Effect of Traditional Electrochemical Micromachining 118

4.4.2 Effect of Electrolyte Jet During Micropatterning 119

4.4.3 Effect of Ultrasonic Assistance During Micropatterning 121

4.4.4 Effect of Ultrasonic Amplitude During Micropatterning 121

4.4.5 Influence of Working Voltage During Micropatterning 121

4.4.6 Influence of Pulse-Off Time During Micropatterning 121

4.4.7 Influence of Electrode Feed Rate During Micropatterning 122

4.5 Conclusions 122

References 123

5 Micro-Electrochemical Piercing on SS 204 125
Manas Barman, Premangshu Mukhopadhyay and Goutam Kumar Bose

5.1 Introduction 125

5.2 Experimentation on SS 204 Plates With Cu Tool Electrodes 126

5.3 Results and Discussions 127

5.4 Conclusions 134

References 134

6 Laser-Assisted Electrochemical Discharge Micromachining 137
Sandip Kunar, Kagithapu Rajendra, V. V. D. Praveen Kalepu, Prasenjit Chatterjee, Asma Perveen, Norfazillah Talib and K.V.S.R. Murthy

6.1 Introduction 138

6.2 Experimental Procedure 140

6.3 Results and Discussion 143

6.3.1 ECDM Pre-Process 143

6.3.2 Laser Pre-Process 145

6.4 Conclusions 147

References 147

7 Laser-Assisted Hybrid Micromachining Processes and Its Applications 151
Ravindra Nath Yadav

7.1 Introduction 152

7.2 Laser-Assisted Hybrid Micromachining 156

7.3 Laser-Assisted Traditional-HMMPs 157

7.3.1 Laser-Assisted Microturning Process 157

7.3.2 Laser-Assisted Microdrilling Process 160

7.3.3 Laser-Assisted Micromilling Process 161

7.3.4 Laser-Assisted Microgrinding Process 162

7.4 Laser-Assisted Nontraditional HMMPs 163

7.4.1 Laser-Assisted Electrodischarge Micromachining 164

7.4.2 Laser-Assisted Electrochemical Micromachining 166

7.4.3 Laser-Assisted Electrochemical Spark Micromachining 167

7.4.4 Laser-Assisted Water Jet Micromachining 168

7.5 Capabilities and Shortfalls of LA-HMMPs 171

7.6 Conclusion 174

Acknowledgment 174

References 174

8 Hybrid Laser-Assisted Jet Electrochemical Micromachining Process 179
Sivakumar M., J. Jerald, Shriram S., Jayanth S. and N. S. Balaji

8.1 Introduction 180

8.2 Overview of Electrochemical Machining 181

8.3 Importance of Electrochemical Micromachining 182

8.4 Fundamentals of Electrochemical Micromachining 182

8.4.1 Electrochemistry of Electrochemical Micromachining 183

8.4.2 Mechanism of Material Removal 184

8.5 Major Factors of EMM 184

8.5.1 Nature of Power Supply 184

8.5.2 Interelectrode Gap (IEG) 185

8.5.3 Temperature, Concentration, and Electrolyte Flow 185

8.6 Jet Electrochemical Micromachining 186

8.7 Laser as Assisting Process 188

8.8 Laser-Assisted Jet Electrochemical Micromachining (la-jecm) 189

8.8.1 Working Principles of LAJECM 189

8.8.2 Mechanism of Material Removal 191

8.8.3 Materials 193

8.8.4 Theoretical and Experimental Method for Process Energy Distribution 194

8.8.5 LAJECM Process Temperature 196

8.8.6 Material Removal Rate and Taper Angle 196

8.8.7 LAJECM and JECM Comparison 197

8.8.8 Machining Precision 198

8.8.8.1 Geometry Precision 198

8.8.8.2 Profile Surface Roughness 200

8.9 Applications of LAJECM 200

References 202

9 Ultrasonic Vibration-Assisted Microwire Electrochemical Discharge Machining 205
Sandip Kunar, Kagithapu Rajendra, Devarapalli Raviteja, Norfazillah Talib, S. Rama Sree and M.S. Reddy

9.1 Introduction 206

9.2 Experimental Setup 207

9.3 Results and Discussion 208

9.3.1 Influence of Ultrasonic Amplitude on Micro Slit Width 209

9.3.2 Influence of Voltage on Micro Slit Width 211

9.3.3 Effect of Duty Ratio on Micro Slit Width 212

9.3.4 Influence of Frequency on Slit Width 213

9.3.5 Analysis of Micro Slits 214

9.4 Conclusions 215

References 216

10 Study of Soda-Lime Glass Machinability by Gunmetal Tool in Electrochemical Discharge Machining and Process Parameters Optimization Using Grey Relational Analysis 219
Pravin Pawar, Amaresh Kumar and Raj Ballav

10.1 Introduction 220

10.2 Experimental Conditions 221

10.3 Analysis of Average MRR of Workpiece (Soda-Lime Glass) Through Gunmetal Electrode 223

10.3.1 ANOVA for Average MRR 224

10.3.2 Influence of Input Factors on Average MRR 228

10.4 Analysis of Average Depth of Machined Hole on Soda-Lime Glass Through Gunmetal Electrode 228

10.4.1 ANOVA for Average Machined Depth 229

10.4.2 Influence of Input Factors on Average Machined Depth 230

10.5 Analysis of Average Diameter of Hole of Soda-Lime Glass Through Gunmetal Electrode 231

10.5.1 ANOVA for Average Hole Diameter 231

10.5.2 Influence of Input Factors on Average Hole Diameter 231

10.6 Grey Relational Analysis Optimization of Soda-Lime Glass Results by Gunmetal Electrode 232

10.6.1 Methodology of Grey Relational Analysis 233

10.6.2 Data Pre-Processing 233

10.6.3 Grey Relational Generating 233

10.6.4 Deviation Sequence 234

10.6.5 Grey Relational Coefficient 235

10.6.6 Grey Relational Grade 235

10.7 Conclusion 238

Acknowledgments 238

References 238

11 Micro Turbine Generator Combined with Silicon Structure and Ceramic Magnetic Circuit 243
Minami Kaneko and Fumio Uchikoba

11.1 Introduction 244

11.2 Concept 246

11.3 Fabrication Technology 247

11.3.1 Microfabrication Technology of Silicon Material 247

11.3.2 Multilayer Ceramic Technology 248

11.4 Designs and Experiments 249

11.4.1 Designs of Turbine and Magnetic Circuit for Single-Phase Type 249

11.4.2 Designs of Turbine and Magnetic Circuit for Three-Phase Type 252

11.4.3 Rotational Experiment and Rotor Blade Design 253

11.4.4 Low Boiling Point Fluid and Experiment 255

11.5 Results and Discussion 255

11.5.1 Fabricated Evaluation 255

11.5.2 Rotational Result 258

11.5.3 Comparison of Rotor Shape and Rotational Motion 262

11.5.4 Phase Change 264

11.6 Conclusions 267

Acknowledgment 268

References 268

12 A Review on Hybrid Micromachining Process and Technologies 271
Akhilesh Kumar Singh, Sandip Kunar, M. Zubairuddin, Pramod Kumar, Marxim Rahula Bharathi B., P.V. Elumalai, M. Murugan and Yarrapragada K.S.S. Rao

12.1 Introduction 272

12.2 Characteristics of Hybrid-Micromachining 272

12.3 Bibliometric Survey of Micromachining to Hybrid-Micromachining 273

12.4 Material Removal in Microsizes 275

12.5 Nontraditional Hybrid-Micromachining Technologies 276

12.6 Classification of Techniques Used for Micromachining to Hybrid-Micromachining 276

12.6.1 Classification According to Material Removal Hybrid-Micromachining Phenomena 277

12.6.2 Classification According to Categories Based on Material Removal Accuracy 277

12.6.3 Classification According to Hybrid-Micromachining Purposes 278

12.6.4 Classification of Hybrid Micromanufacturing Processes 278

12.7 Materials Are Used and Application of Hybrid-Micromachining 278

12.8 Conclusions 279

References 279

13 Material Removal in Spark-Assisted Chemical Engraving for Micromachining 283
Sumanta Banerjee

13.1 Introduction 284

13.2 Essentials of SACE 285

13.2.1 Instances of SACE Micromachining 286

13.3 Genesis of SACE Acronym: A Brief Historical Survey 286

13.4 SACE: A Viable Micromachining Technology 288

13.4.1 Mechanical µ-Machining Techniques 288

13.4.2 Chemical µ-Machining Methods 289

13.4.3 Thermal µ-Machining Methods 289

13.5 Material Removal Mechanism in SACE µ-Machining 290

13.5.1 General Aspects 290

13.5.2 Micromachining at Shallow Depths 294

13.5.3 Micromachining at High Depths 300

13.5.4 Micromachining by Chemical Reaction 301

13.6 SACE µ-Machining Process Control 303

13.6.1 Analysis of Process 303

13.6.2 Etch Promotion 304

13.7 Conclusion and Scope for Future Work 307

References 308

Index 313

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