Micro-optomechatronics

Micro-Optomechatronics systematically explains the devices based upon the fusion of optics, electronics, and mechanics via MEMS technology. The book first demonstrates how devices are classified based upon the control methods of power and position of the laser beam. It then describes the devices in detail according to the classification of control methods. Positional control is classified as intermittent control, constant velocity control, and follow-up control. The volume concludes with an explanation of the optics and dynamics that provide the theoretical background of control methods, and an overview of the influence of nanotechnology and near-field optical memory.