Run-To-Run Control in Semiconductor Manufacturing

Run-to-run (R2R) control is cutting-edge technology that allows modification of a product recipe between machine "runs," thereby minimizing process drift, shift, and variability. The only barrier to widespread adoption of this highly effective process control by the semiconductor industry is a lack of understanding of the technology. This book overcomes that barrier by offering in-depth analyses of R2R control, and is a must-read for technical managers, process and quality engineers, and production strategists who must remain current with state-of-the-art control technology.Marketing Class Code: 4E07