Scanning Electron Microscopy: Physics of Image Formation and Microanalysis, by Reimer, Ludwig
- ISBN: 9783642083723 | 3642083722
- Cover: Paperback
- Copyright: 1/1/1999
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Scanning Electron Microscopy provides a description of the physics of electron-probe formation and of electron-specimen interactions. The different imaging and analytical modes using secondary and backscattered electrons, electron-beam-induced currents, X-ray and Auger electrons, electron channelling effects, and cathodoluminescence are discussed to evaluate specific contrasts and to obtain quantitative information.