Electron Energy Loss Spectroscopy

Electron Energy Loss Spectroscopy (EELS) is a high-resolution technique used for the analysis of thin samples of material. The technique is used in many modern transmission electron microscopes to characterize materials. This book provides an up-to-date introduction to the principles and applications of EELS. Specific topics covered include, theory of EELS, elemental quantification, EELS fine structure, EELS imaging and advanced techniques.

Rik Brydson is a Reader in Materials Characterization in the Materials Department at the University of Leeds in the UK.

Abbreviations

ix

Preface

xi

Acknowledgements

xii

Introduction

1

(26)

What is EELS?

1

(1)

Interaction of electrons with matter

2

(15)

Basics of the TEM

17

(3)

Comparison of EELS in TEM with other spectroscopies

20

(5)

Conclusions

25

(1)

References

25

(2)

The EEL spectrum

27

(12)

The primary transmitted electron signal

27

(1)

Historical development

27

(2)

Basic components of an EEL spectrum

29

(3)

Basic physics

32

(4)

Summary of analytical uses

36

(1)

References

37

(2)

EELS instrumentation and experimental aspects

39

(20)

The electron spectrometer

39

(3)

Coupling a magnetic spectrometer to the microscope

42

(2)

Spectral recording

44

(5)

Energy-filtered imaging

49

(2)

Choice of experimental conditions for EELS

51

(5)

Specimen parameters

56

(1)

Summary of experimental set-up and data acquisition procedures for EELS

57

(1)

Summary of data correction procedures for EELS

58

(1)

References and further reading

58

(1)

Low loss spectroscopy

59

(10)

Quantification of sample thickness

59

(2)

Quantitative aspects of low loss data

61

(5)

Experimental aspects of EELS low loss measurements

66

(1)

Conclusions

67

(1)

References and further reading

67

(2)

Elemental quantification

69

(10)

Quantification of EEL spectra

69

(1)

Background removal

70

(2)

Determination of the ionization cross-section

72

(3)

Final quantification step

75

(1)

Summary of the quantification procedure

76

(1)

Summary of experimental quantification parameters

76

(1)

Accuracy and detection sensitivity of EELS quantification and comparison with EDX in the TEM

77

(1)

References and further reading

78

(1)

Fine structure on inner-shell ionization edges (ELNES/EXELFS)

79

(18)

Origin of edge fine structure

79

(5)

Determination of coordinations

84

(4)

Determination of valencies

88

(3)

Determination of bond lengths

91

(2)

Experimental aspects of ELNES/EXELFS measurements

93

(2)

Conclusions

95

(1)

References and further reading

95

(2)

EELS imaging

97

(18)

Introduction to EELS imaging and energy filtering

97

(2)

Summary of energy-filtering techniques

99

(2)

Procedure for EFTEM elemental mapping

101

(3)

Experimental parameters in EFTEM

104

(5)

Correlation of elemental maps

109

(1)

General strategy for EFTEM elemental analysis

109

(1)

Experimental procedure for EFTEM image acquisition and processing

110

(1)

Comparison of EFTEM and spectrum imaging methods

111

(1)

Energy-filtered tomography

112

(1)

Conclusions

113

(1)

References and further reading

113

(2)

Advanced EELS techniques in the TEM

115

(14)

Orientation dependency in EELS

115

(3)

Spatially resolved measurements

118

(7)

Electron Compton scattering

125

(1)

Reflection mode and surface measurements

126

(1)

References and further reading

127

(2)

Conclusions

129

(4)

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Electron Energy Loss Spectroscopy

Summary

Author Biography

Table of Contents

Supplemental Materials