Solid-State Physics, Fluidics, and Analytical Techniques in Micro- and Nanotechnology

Providing a clear theoretical understanding of MEMS and NEMS, Solid State Physics in Microfabrication and Nanotechnologycovers all aspects of solid state physics behind nanotechnology and science.  After exploring the rise of Si, MEMS, and NEMS in a historical context, the text discusses crystallography, quantum mechanics, the band theory of solids, and the silicon single crystal. It concludes with coverage of photonics, the quantum hall effect, and superconductivity. The text offers end-of-chapter problems, worked examples throughout, extensive references, and PowerPoint slides for download, along with a solutions manual for qualifying instructors.