Spectroscopic Ellipsometry and Reflectometry A User's Guide
, by Tompkins, Harland G.; McGahan, William A.- ISBN: 9780471181729 | 0471181722
- Cover: Hardcover
- Copyright: 3/18/1999
Harland Tompkins retired from full-time employment in 2001. During his full-time employment, he was employed by General Electric Co., Bell Laboratories, the Idaho National Engineering Lab, and Motorola.
William A. McGahan is the author of Spectroscopic Ellipsometry and Reflectometry: A User's Guide, published by Wiley.
Preface | xiii | ||||
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PROTOTYPICAL ANALYSES | |||||
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Appendices | |||||
A Regression Algorithms | 195 | (1) | |||
A.1 The Merit Function | 195 | (1) | |||
A.2 The Analysis Procedure | 195 | (1) | |||
A.3 The Algorithms | 196 | (1) | |||
A.4 The Combination | 197 | (1) | |||
A.5 References | 198 | (1) | |||
B Maxwell's Equations and the Wave Equation | 199 | (1) | |||
B.1 Introduction | 199 | (2) | |||
B.2 Differential Equation Form of Maxwell's Equations | 201 | (1) | |||
B.3 The Wave Equation | 201 | (1) | |||
B.3.1 Dielectric Media | 201 | (3) | |||
B.3.2 Including Conductors | 204 | (1) | |||
B.3.3 The Magnetic Field Wave | 205 | (2) | |||
B.4 References | 207 | (1) | |||
B.5 Vector Calculus Notation Review | 207 | (1) | |||
B.5.1 Vector Algebra | 207 | (1) | |||
B.5.2 Scalar and Vector Fields | 208 | (1) | |||
B.5.3 Vector Calculus | 208 | (4) | |||
C Snell's Law, Fresnel's Equations, and the Total Reflection Coefficient Derivations and Historical Perspective | 212 | (1) | |||
C.1 Introduction | 212 | (1) | |||
C.2 Reflection and Refraction (Snell's Law) | 212 | (4) | |||
C.3 Fresnel's Reflection and Transmission Coefficients | 216 | (4) | |||
C.4 Using the Complex Index of Refraction | 220 | (1) | |||
C.5 Total Reflection Coefficient for a Film on a Substrate | 221 | (3) | |||
C.6 References | 224 | (1) | |||
Index | 225 |
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