Thin-Film Deposition: Principles and Practice

Thin film deposition is a broad & burgeoning field, with applications ranging from razor blade coatings to quantum-well lasers. However, much of the available thin film literature is based on empirical knowledge, & focuses only on specific processes or applications. This volume rectifies that situation, offering a complete description of the theory & technology of thin film deposition. The book's broad perspective gives readers the tools to objectively evaluate & choose the appropriate thin film process for a specific application. This indispensable volume also includes a complete list of symbols & an extensive index.

Thin Film Technology.Gas Kinetics.Vacuum Technology.Evaporation.Deposition.Epitaxy.Chemical Vapor Deposition.High-Energy Techniques.Plasma Processes.Film Characterization.