Materials Design, Fabrication, Packaging and Reliability of Nano and Micro-Electro-Mechanical Systems (N/MEMS)

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Materials Design, Fabrication, Packaging and Reliability of Nano and Micro-Electro-Mechanical Systems (N/MEMS) by Yavuz, Mustafa; Willoughby, Arthur; Capper, Peter; Kasap, Safa, 9781119130796
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  • ISBN: 9781119130796 | 1119130794
  • Cover: Hardcover
  • Copyright: 3/8/2021

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