Materials Design, Fabrication, Packaging and Reliability of Nano and Micro-Electro-Mechanical Systems (N/MEMS)
, by Yavuz, Mustafa; Willoughby, Arthur; Capper, Peter; Kasap, SafaNote: Supplemental materials are not guaranteed with Rental or Used book purchases.
- ISBN: 9781119130796 | 1119130794
- Cover: Hardcover
- Copyright: 3/8/2021