Microelectromechanical Systems - Materials and Devices IV
, by Delrio, Frank W.; De Boer, Maarten P.; Eberl, Christoph; Gusev, EvgeniNote: Supplemental materials are not guaranteed with Rental or Used book purchases.
- ISBN: 9781107406834 | 1107406838
- Cover: Paperback
- Copyright: 6/5/2014