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Microelectromechanical Systems - Materials ...
by Delrio, Frank W.; De Boer, Maarten P.; Eberl, Christoph; et al.
ISBN: 9781107406834
Copyright:
Paperback
MEMS, BioMEMS and Bioelectronics-Materials ...
by Albrecht, Tim; De Boer, Maarten P.; Delrio, Frank W.; et al.
ISBN: 9781605113920
Hardcover
ISBN: 9781605112763