Reliability of MEMS Testing of Materials and

This first book to cover exclusively and in detail the principles, tools and methods for determining the reliability of microelectromechanical materials, components and devices covers both component materials as well as entire MEMS devices. Divided into two major parts, following a general introductory chapter to reliability issues, the first part looks at the mechanical properties of the materials used in MEMS, explaining in detail the necessary measuring technologies -- nanoindenters, bulge methods, bending tests, tensile tests, and others. Part Two treats the actual devices, organized by important device categories such as pressure sensors, inertial sensors, RF MEMS, and optical MEMS.

Osamu Tabata is Professor in the Department of Microengineering at Kyoto University. He received his MSc and PhD degrees from Nagoya Institute of Technology. From 1981 to 1996, he performed industrial research at Toyota Central Research and Development Laboratories in Aichi, Japan. He joined the Department of Mechanical Engineering of Ritsumeikan University in Shiga, Japan, in 1996, and the Department of Mechanical Engineering at Kyoto University in 2003. Osamu Tabata is engaged in the research of micro/nano processes, MEMS and micro/nano system synthetic engineering. He received numerous awards, including the Science News Award and the Research & Development Top 100 Award in 1993 and 1998.

Toshiyuki Tsuchiya is Assistant Professor in the Department of Microengineering at Kyoto University. He received his PhD from Nagoya University, Japan, in 2002. From 1993 to 2004, he carried out industrial research at Toyota Central Research and Development Laboratories in Aichi, Japan. In 2004, he joined the Department of Mechanical Engineering of Kyoto University. Toshiyuki Tsuchiya's current research is focused on mechanical properties evaluation of micro/nano materials and MEMS and micro/nano system synthetic engineering.

Preface V

Foreword VII

List of Contributors XI

Overview XIII

1 Evaluation of Mechanical Properties of MEMS Materials and Their Standardization 1
Toshiyuki Tsuchiya

2 Elastoplastic Indentation Contact Mechanics of Homogeneous Materials and Coating–Substrate Systems 27
Mototsugu Sakai

3 Thin-film Characterization Using the Bulge Test 67
Oliver Paul, Joao Gaspar

4 Uniaxial Tensile Test for MEMS Materials 123
Takahiro Namazu

5 On-chip Testing of MEMS 163
Harold Kahn

6 Reliability of a Capacitive Pressure Sensor 185
Fumihiko Sato, Hideaki Watanabe, Sho Sasaki

7 Inertial Sensors 205
Osamu Torayashiki, Kenji Komaki

8 Inertial Sensors 225
Noriyuki Yasuike

9 Reliability of MEMS Variable Optical Attenuator 239
Hiroshi Toshiyoshi, Keiji Isamoto, Changho Chong

10 Eco Scan MEMS Resonant Mirror 267
Yuzuru Ueda, Akira Yamazaki

Index 291

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Reliability of MEMS Testing of Materials and Devices

Summary

Author Biography

Table of Contents

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