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Reliability of MEMS Testing of Materials and ...

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ISBN: 9783527335015

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CMOS - MEMS

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ISBN: 9783527334995

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Micro Process Engineering Fundamentals, ...

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ISBN: 9783527335008

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Enabling Technology for MEMS and Nanodevices ...

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ISBN: 9783527334988

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Micro Energy Harvesting

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ISBN: 9783527319022

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Resonant MEMS Fundamentals, Implementation, ...

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ISBN: 9783527335459

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Micro- and Nanomanipulation Tools

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ISBN: 9783527337842

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Thermoelectric Energy Conversion Basic ...

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ISBN: 9783527340712

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Micro and Nano Scale NMR Technologies and ...

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ISBN: 9783527340569

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Enabling Technology for MEMS and Nanodevices ...

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ISBN: 9783527307463

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