MEMS Mechanical Sensors

Here's the book to keep handy when you have to overcome obstacles in design, simulation, fabrication and application of MEMS sensors. This practical guide to design tools and packaging helps you create the sensors you need for the full range of mechanical microsensor applications. Critical physical sensing techniques covered include piezoresistive, piezoelectric, capacative, optical, resonant, actuation, thermal, and magnetic, as well as smart sensing.

Preface

ix

CHAPTER 1 Introduction

1

(6)

1.1 Motivation for the Book

1

(1)

1.2 What Are MEMS?

2

(1)

1.3 Mechanical Transducers

3

(1)

1.4 Why Silicon?

4

(1)

1.5 For Whom Is This Book Intended?

5

(1)

References

5

(2)

CHAPTER 2 Materials and Fabrication Techniques

7

(32)

2.1 Introduction

7

(1)

2.2 Materials

7

(4)

2.2.1 Substrates

7

(4)

2.2.2 Additive Materials

11

(1)

2.3 Fabrication Techniques

11

(25)

2.3.1 Deposition

12

(5)

2.3.2 Lithography

17

(4)

2.3.3 Etching

21

(7)

2.3.4 Surface Micromachining

28

(1)

2.3.5 Wafer Bonding

29

(3)

2.3.6 Thick-Film Screen Printing

32

(1)

2.3.7 Electroplating

33

(1)

2.3.8 LIGA

34

(1)

2.3.9 Porous Silicon

35

(1)

2.3.10 Electrochemical Etch Stop

35

(1)

2.3.11 Focused Ion Beam Etching and Deposition

36

(1)

References

36

(3)

CHAPTER 3 MEMS Simulation and Design Tools

39

(18)

3.1 Introduction

39

(1)

3.2 Simulation and Design Tools

40

(16)

3.2.1 Behavioral Modeling Simulation Tools

40

(3)

3.2.2 Finite Element Simulation Tools

43

(13)

References

56

(1)

CHAPTER 4 Mechanical Sensor Packaging

57

(28)

4.1 Introduction

57

(1)

4.2 Standard IC Packages

58

(1)

4.2.1 Ceramic Packages

58

(1)

4.2.2 Plastic Packages

59

(1)

4.2.3 Metal Packages

59

(1)

4.3 Packaging Processes

59

(7)

4.3.1 Electrical Interconnects

60

(3)

4.3.2 Methods of Die Attachment

63

(2)

4.3.3 Sealing Techniques

65

(1)

4.4 MEMS Mechanical Sensor Packaging

66

(14)

4.4.1 Protection of the Sensor from Environmental Effects

67

(4)

4.4.2 Protecting the Environment from the Sensor

71

(1)

4.4.3 Mechanical Isolation of Sensor Chips

71

(9)

4.5 Conclusions

80

(1)

References

81

(4)

CHAPTER 5 Mechanical Transduction Techniques

85

(28)

5.1 Piezoresistivity

85

(4)

5.2 Piezoelectricity

89

(3)

5.3 Capacitive Techniques

92

(2)

5.4 Optical Techniques

94

(3)

5.4.1 Intensity

94

(1)

5.4.2 Phase

95

(1)

5.4.3 Wavelength

96

(1)

5.4.4 Spatial Position

96

(1)

5.4.5 Frequency

96

(1)

5.4.6 Polarization

97

(1)

5.5 Resonant Techniques

97

(7)

5.5.1 Vibration Excitation and Detection Mechanisms

98

(1)

5.5.2 Resonator Design Characteristics

99

(5)

5.6 Actuation Techniques

104

(5)

5.6.1 Electrostatic

104

(3)

5.6.2 Piezoelectric

107

(1)

5.6.3 Thermal

107

(2)

5.6.4 Magnetic

109

(1)

5.7 Smart Sensors

109

(3)

References

112

(1)

CHAPTER 6 Pressure Sensors

113

(40)

6.1 Introduction

113

(1)

6.2 Physics of Pressure Sensing

114

(7)

6.2.1 Pressure Sensor Specifications

117

(3)

6.2.2 Dynamic Pressure Sensing

120

(1)

6.2.3 Pressure Sensor Types

121

(1)

6.3 Traditional Pressure Sensors

121

(2)

6.3.1 Manometer

121

(1)

6.3.2 Aneroid Barometers

122

(1)

6.3.3 Bourdon Tube

122

(1)

6.3.4 Vacuum Sensors

123

(1)

6.4 Diaphragm-Based Pressure Sensors

123

(7)

6.4.1 Analysis of Small Deflection Diaphragm

125

(2)

6.4.2 Medium Deflection Diaphragm Analysis

127

(1)

6.4.3 Membrane Analysis

127

(1)

6.4.4 Bossed Diaphragm Analysis

128

(1)

6.4.5 Corrugated Diaphragms

129

(1)

6.4.6 Traditional Diaphragm Transduction Mechanisms

129

(1)

6.5 MEMS Technology Pressure Sensors

130

(13)

6.5.1 Micromachined Silicon Diaphragms

130

(2)

6.5.2 Piezoresistive Pressure Sensors

132

(5)

6.5.3 Capacitive Pressure Sensors

137

(2)

6.5.4 Resonant Pressure Sensors

139

(3)

6.5.5 Other MEMS Pressure Sensing Techniques

142

(1)

6.6 Microphones

143

(2)

6.7 Conclusions

145

(1)

References

145

(8)

CHAPTER 7 Force and Torque Sensors

153

(20)

7.1 Introduction

153

(1)

7.2 Silicon-Based Devices

154

(3)

7.3 Resonant and SAW Devices

157

(2)

7.4 Optical Devices

159

(1)

7.5 Capacitive Devices

160

(2)

7.6 Magnetic Devices

162

(2)

7.7 Atomic Force Microscope and Scanning Probes

164

(2)

7.8 Tactile Sensors

166

(2)

7.9 Future Devices

168

(1)

References

168

(5)

CHAPTER 8 Inertial Sensors

173

(40)

8.1 Introduction

173

(2)

8.2 Micromachined Accelerometer

175

(20)

8.2.1 Principle of Operation

175

(5)

8.2.2 Research Prototype Micromachined Accelerometers

180

(12)

8.2.3 Commercial Micromachined Accelerometer

192

(3)

8.3 Micromachined Gyroscopes

195

(11)

8.3.1 Principle of Operation

195

(4)

8.3.2 Research Prototypes

199

(5)

8.3.3 Commercial Micromachined Gyroscopes

204

(2)

8.4 Future Inertial Micromachined Sensors

206

(1)

References

207

(6)

CHAPTER 9 Flow Sensors

213

(44)

9.1 Introduction to Microfluidics and Applications for Micro Flow Sensors

214

(3)

9.2 Thermal Flow Sensors

217

(12)

9.2.1 Research Devices

219

(6)

9.2.2 Commercial Devices

225

(4)

9.3 Pressure Difference Flow Sensors

229

(3)

9.4 Force Transfer Flow Sensors

232

(7)

9.4.1 Drag Force

232

(3)

9.4.2 Lift Force

235

(1)

9.4.3 Coriolis Force

236

(2)

9.4.4 Static Turbine Flow Meter

238

(1)

9.5 Nonthermal Time of Flight Flow Sensors

239

(2)

9.5.1 Electrohydrodynamic

239

(1)

9.5.2 Electrochemical

240

(1)

9.6 Flow Sensor Based on the Faraday Principle

241

(1)

9.7 Flow Sensor Based on the Periodic Flapping Motion

242

(1)

9.8 Flow Imaging

243

(2)

9.9 Optical Flow Measurement

245

(2)

9.9.1 Fluid Velocity Measurement

245

(1)

9.9.2 Particle Detection and Counting

246

(1)

9.9.3 Multiphase Flow Detection

246

(1)

9.10 Turbulent Flow Studies

247

(1)

9.11 Conclusion

248

(2)

References

250

(7)

About the Authors

257

(2)

Index

259

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MEMS Mechanical Sensors

Summary

Table of Contents

Supplemental Materials