Nanotechnology Integrated Processing Systems for Ultra-precision and Ultra-fine products

This book is written by the world leading expert in nanotechnology. Itexamines the manufacture of integrated circuits and opto-electronic devices andthe systems required to achieve accuracy in the nanometre range. Nanotechnologyis essential in the fabrication of extremely precise and fine parts. Thistechnology is vital to the advances being made in various high-tech processes.This highly topical work will therefore be an essential source of reference foracademic and industrial research and research workers particularly inhigh-technology and precision industries.