Advanced Interconnects and Chemical Mechanical Planarization for Micro- and Nanoelectronics

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Advanced Interconnects and Chemical Mechanical Planarization for Micro- and Nanoelectronics by Bartha, J. W.; Borst, C. L.; Denardis, D.; Kim, K.; Naeemi, A., 9781605112268
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  • ISBN: 9781605112268 | 1605112267
  • Cover: Hardcover
  • Copyright: 10/5/2010

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The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
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