From MEMS to Bio-MEMS and Bio-NEMS: Manufacturing Techniques and Applications

Bio-MEMS and Bio-NEMS: Manufacturing Techniques and Applicationsdetails manufacturing techniques applicable to bio-nanotechnology. After reviewing MEMS techniques, materials, and modeling, the author covers nanofabrication, genetically engineered proteins, artificial cells, nanochemistry, and self-assembly. He also discusses scaling laws in MEMS and NEMS, actuators, fluidics, and power and brains in miniature devices. He concludes with coverage of various MEMS and NEMS applications. The text offers end-of-chapter problems, worked examples throughout, extensive references, and PowerPoint slides for download, along with a solutions manual for qualifying instructors.