Fundamentals of Laser Micromachining

A well-established technology for high-precision microfabrication, laser micromachining is constantly being applied to new areas and materials. Based on a course taught by the author at SPIE conferences, as well as at universities and private companies, this book discusses several aspects of laser micromachining technology, from laser physics, optics, and optical components to laser-matter interactions. It then progresses to explore applications in a range of disciplines and materials. It covers metrology and cleaning as well as optics and beam delivery. Suitable as a text for advanced/professional courses and a reference for those in the industry, the text includes problems and offers a solutions manual.