Gaseous Electronics: Theory and Practice

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ISBN: 9780849337635 | 0849337631
Cover: Hardcover
Copyright: 11/10/2005

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With coverage ranging from low pressure discharges to discharges that occur at high voltage and high frequency, this book focuses on the basic concepts required to understand the behavior of electrons in an electric discharge. Designed to serve as a graduate textbook and a data source, the author presents a unified treatment of all types of discharges in a comprehensive manner. Pulling together data scattered throughout the literature, the book provides data comparisons that help readers make decisions. Extensive literature references are cited for both theory and experimental data, and each chapter, with it own list of references, is independent of the other chapters.

Collision Fundamentals

(54)

Coordinate Systems

(4)

Laboratory Coordinates

(2)

Center of Mass Coordinates

(2)

Meaning of Velocity Space

(3)

Maxwell's Distribution Function

(2)

Mean Free Path

(1)

Particle Collisions

(28)

Elastic Collisions

(3)

Energy Transfer in Elastic Collisions

(2)

Differential Scattering Cross Section

(3)

Momentum Transfer Cross Section

(1)

Diffusion Coefficient

(2)

Einstein Relationship

(1)

Inelastic Collisions

(2)

Collision Frequency

(5)

Rate Coefficients and Constants

(4)

Ion Mobility

(5)

Potential Functions for Particle Interactions

(4)

Quantum Mechanical Approach to Scattering

(12)

References

(3)

Experimental Methods

(38)

Total Collision Cross Sections

(11)

Ramsauer Technique

(2)

Modified Ramsauer's Technique

(2)

Linear Transmission Method

(1)

Time-of-Flight Method

(4)

Photoelectron Spectroscopy

(1)

Differential Cross Sections

(4)

Beam Scattering Technique

(1)

Crossed Beams Technique

(3)

Ionization Cross Section

(6)

Ionization Tube Method

(2)

Ionization Tube with e/m Discrimination

(1)

Crossed Beams Methods

(3)

Pulsed Crossed Beam Technique

(1)

Time-of-Flight Method

(1)

Total Excitation Cross Section

(8)

Resonance near Excitation Onset

(2)

Laser Fluoroscence Method

(1)

Swarm Method for Ro-Vibrational Excitation

(3)

Semiempirical Approach

(1)

Attachment Cross Section

(4)

Concluding Remarks

(5)

References

(4)

Data on Cross Sections---I. Rare Gases

(100)

Argon

(23)

Total and Momentum Transfer Cross Sections in Ar (20 ≤ ε ≤ 1000 eV)

(3)

Total Cross Sections in Ar (0 < ε ≤ 20 eV)

(1)

Elastic and Differential Cross Sections in Ar

100

(3)

Total Excitation Cross Sections in Ar

103

(5)

Ionization Cross Sections in Ar

108

(6)

Verification of the Sigma Rule for Ar

114

(2)

Helium

116

(15)

Total and Momentum Transfer Cross Sections in He

117

(3)

Elastic and Differential Cross Sections in He

120

(3)

Total Excitation Cross Sections in He

123

(4)

Ionization Cross Sections in He

127

(3)

Verification of the Sigma Rule for He

130

(1)

Krypton

131

(20)

Total Cross Sections in Kr

132

(1)

Modified Effective Range Theory (MERT)

133

(7)

Momentum Transfer Cross Sections in Kr

140

(2)

Elastic and Differential Cross Sections in Kr

142

(3)

Total Excitation Cross Sections in Kr

145

(3)

Ionization Cross Sections in Kr

148

(3)

Verification of the Sigma Rule for Kr

151

(1)

Neon

151

(19)

Total Cross Sections in Ne

152

(3)

Momentum Transfer Cross Sections in Ne

155

(2)

Elastic and Differential Cross Sections in Ne

157

(4)

Total Excitation Cross Sections in Ne

161

(4)

Ionization Cross Sections in Ne

165

(4)

Verification of the Sigma Rule for Ne

169

(1)

Xenon

170

(15)

Total Cross Sections in Xe

171

(1)

Momentum Transfer Cross Sections in Xe

172

(4)

Elastic and Differential Cross Sections in Xe

176

(1)

Total Excitation Cross Sections in Xe

176

(5)

Ionization Cross Sections in Xe

181

(2)

Verification of the Sigma Rule for Xe

183

(2)

Concluding Remarks

185

(8)

References

186

(7)

Data on Cross Sections---II. Diatomic Gases

193

(74)

Carbon Monoxide (CO)

193

(18)

Total Cross Sections in CO

195

(3)

Momentum Transfer Cross Sections in CO

198

(1)

Elastic Scattering Cross Sections in CO

199

(1)

Rotational and Vibrational Cross Sections in CO

199

(4)

Electronic Excitation Cross Sections in CO

203

(5)

Ionization Cross Sections in CO

208

(3)

Verification of the Sigma Rule for CO

211

(1)

Molecular Hydrogen (H2)

211

(14)

Total Cross Sections in H2

212

(4)

Elastic Scattering Cross Sections in H2

216

(1)

Momentum Transfer Cross Sections in H2

216

(2)

Ro-Vibrational Cross Sections in H2

218

(3)

Electronic Excitation Cross Sections in H2

221

(1)

Ionization Cross Sections in H2

222

(2)

Sigma Rule for H2

224

(1)

Molecular Nitrogen

225

(13)

Total Cross Sections in N2

226

(3)

Momentum Transfer Cross Sections in N2

229

(1)

Elestic Scattering Cross Sections in N2

230

(1)

Ro-Vibrational Excitation in N2

230

(2)

Electronic Excitation Cross Sections in N2

232

(4)

Ionization Cross Sections in N2

236

(1)

Sigma Rule for N2

237

(1)

Molecular Oxygen (O2)

238

(12)

Total Scattering Cross Sections in O2

238

(2)

Momentum Transfer Cross Sections in O2

240

(1)

Elastic Scattering Cross Sections in O2

241

(2)

Ro-Vibrational Excitation Cross Sections in O2

243

(2)

Electronic Excitation Cross Sections in O2

245

(1)

Dissociation Cross Sections in O2

246

(3)

Ionization Cross Sections in O2

249

(1)

Sigma Rule in O2

250

(1)

Nitric Oxide (NO)

250

(6)

Total Scattering Cross Sections (NO)

251

(2)

Momentum Transfer and Elastic Scattering in NO

253

(1)

Electronic Excitation Cross Sections in NO

253

(1)

Ionization Cross Sections in NO

254

(2)

Sigma Rule Verification for NO

256

(1)

Closing Remarks

256

(11)

References

259

(8)

Data on Cross Sections---III. Industrial Gases

267

(62)

Carbon Dioxide (CO2)

267

(12)

Total Scattering Cross Sections in CO2

267

(3)

Elastic and Momentum Transfer Cross Sections in CO2

270

(2)

Ro-Vibrational Excitation Cross Sections in CO2

272

(3)

Electronic Excitation Cross Sections in CO2

275

(3)

Ionization Cross Sections in CO2

278

(1)

Sigma Check for CO2

279

(1)

Hydrocarbon Gases CxHy

279

(4)

Total Scattering Cross Sections in CxHy

280

(1)

Methane (CH4)

281

(1)

Other Hydrocarbons

281

(1)

Inelastic Scattering Cross Sections in CxHy

282

(1)

Vibrational Excitation Cross Sections

282

(1)

Excitation Cross Sections

282

(1)

Mercury Vapor

283

(3)

Nitrous Oxide (N2O)

286

(4)

Ozone (O3)

290

(3)

Silane (SiH4)

293

(1)

Sulfur Hexafluoride (SF6)

293

(12)

Total Scattering Cross Section in SF6

296

(2)

Momentum Transfer Cross Sections in SF6

298

(2)

Elastic and Differential Cross Sections in SF6

300

(1)

Vibrational Excitation Cross Sections in SF6

300

(3)

Electronic Excitation Cross Sections in SF6

303

(1)

Ionization Cross Sections in SF6

304

(1)

Water Vapor (H2O)

305

(3)

Plasma Processing Gases

308

(7)

Tetrafluoromethane (CF4)

308

(2)

Perfluoroethane (C2F6)

310

(2)

Perfluoropropane (C3F8)

312

(1)

Dichlorodifluoromethane (CCI2F2)

313

(2)

Other Gases

315

(1)

Ammonia (NH3)

315

(1)

Disilane (Si2H6)

315

(1)

Germane (GeH4)

315

(1)

Hexafluoropropene (C3F6)

315

(1)

Hydrogen Sulphide (H2S)

315

(1)

Nitrogen Dioxide (NO2)

315

(1)

Sulphur Dioxide (SO2)

315

(1)

Tetrachlorogermane (GeCl4)

315

(1)

Uranium Fluoride (UF6)

315

(1)

Concluding Remarks

316

(13)

References

318

(11)

Drift and Diffusion of Electrons---I

329

(78)

Definitions

329

(1)

Drift and Diffusion Measurement

330

(4)

Electron Energy Distribution

334

(3)

Approximate Methods

337

(2)

Data on Drift and Diffusion

339

(68)

Air (Dry and Humid)

339

(2)

Argon

341

(9)

Carbon Dioxide (CO2)

350

(4)

Carbon Monoxide (CO)

354

(3)

Helium (He)

357

(5)

Hydrogen (H2) and Deuterium (D2)

362

(9)

Krypton (Kr)

371

(2)

Metallic Vapors

373

(1)

Cesium (Cs)

373

(3)

Mercury (Hg)

376

(4)

Sodium (Na) and Thallium (Tl)

380

(1)

Neon (Ne)

381

(3)

Nitrogen (N2)

384

(9)

Oxygen (O2)

393

(4)

Xenon (Xe)

397

(2)

References

399

(8)

Drift and Diffusion of Electrons---II. Complex Molecules

407

(46)

Current Pulse Due to Avalanche

407

(7)

Electron Current (Integrating Mode)

410

(1)

Electron Current (Differential Mode)

411

(3)

Ion Current (Differential Mode)

414

(1)

Arrival Time Spectrum Method

414

(2)

Hydrocarbon Gases

416

(7)

Methane (CH4)

418

(3)

Ethane (C2H6)

421

(2)

Selected Hydrocarbons

423

(1)

Nitrogen Compounds

423

(3)

Ammonia

424

(2)

NO, N2O, and NO2

426

(1)

Plasma Industrial Gases

426

(8)

Trifluoromethane (CHF3)

426

(4)

Tetrafluoromethane (CF4)

430

(2)

Dichlorodifluoromethane (CCI2F2)

432

(1)

Hexafluoroethane (C2F6)

432

(1)

Perfluoropropane (C3F8)

432

(1)

Silane (SiH4)

433

(1)

Sulfur Hexafluoride (SF6)

434

(4)

Water Vapor (H2O and D2O)

438

(2)

Miscellaneous Gases

440

(3)

Halogens

440

(1)

Fluorine (F2)

440

(2)

Chlorine (Cl2)

442

(1)

Bromine (Br2)

443

(1)

Iodine (I2)

443

(1)

Concluding Remarks

443

(10)

References

447

(6)

Ionization Coefficients---I. Nonelectron-Attaching Gases

453

(42)

Discharge Development

453

(1)

Current Growth in Uniform Fields

453

(5)

Measurement of α and γ

456

(1)

Ionization Chamber

456

(1)

Vacuum System

457

(1)

Gas Handling System

458

(1)

Irradiation System

458

(1)

Voltage and Current Measurement

458

(1)

Functional Dependence of a/N on E/N

458

(3)

Space Charge Effects

461

(4)

Breakdown in Uniform Fields

465

(5)

Multiplication in Nonuniform Fields

470

(4)

Electric Field along the Axis of Confocal Paraboloids

472

(1)

Radial Electric Field in a Coaxial Cylindrical Geometry

472

(2)

Concentric Sphere--Hemisphere

474

(1)

Sphere-Plane

474

(1)

Sphere-Sphere

474

(1)

Recombination

474

(1)

Data on Ionization Coefficients

475

(5)

Rare Gases

475

(1)

Argon (Ar)

475

(2)

Helium (He)

477

(1)

Krypton (Kr)

478

(1)

Neon (Ne)

478

(1)

Xenon (Xe)

478

(2)

Molecular Gases (Nonattaching)

480

(5)

Hydrocarbon Gases

480

(1)

Methane (CH4)

480

(1)

Other Hydrocarbons

480

(2)

Hydrogen and Nitrogen

482

(1)

Hydrogen (H2)

482

(2)

Deuterium (D2)

484

(1)

Nitrogen (N2)

484

(1)

Other Gases (Nonattaching)

485

(10)

Mercury Vapor

485

(2)

Tetraethoxysilane

487

(1)

References

487

(8)

Ionization and Attachment Coefficients---II. Electron-Attaching Gases

495

(48)

Attachment Processes

495

(1)

Current Growth in Attaching Gases

496

(4)

Ionization and Attachment Coefficients

500

(36)

Dry and Humid Air

500

(3)

Carbon Dioxide and Carbon Monoxide

503

(1)

Carbon Dioxide (CO2)

503

(1)

Carbon Monoxide (CO)

504

(2)

Freon--12 (CCI2F2)

506

(1)

Halogens

507

(1)

Fluorine (F2)

508

(1)

Chlorine (CI2)

509

(1)

Bromine (Br2)

510

(3)

Iodine (I2)

513

(1)

Nitrogen Compounds

513

(1)

Ammonia (NH3)

514

(1)

Nitric Oxide (NO)

515

(3)

Nitrous Oxide (N2O)

518

(2)

Nitrogen Dioxide and Sulfur Dioxide (NO2 and SO2)

520

(4)

Oxygen (O2)

524

(2)

Sulfur Hexafluoride (SF6)

526

(8)

Selected Industrial Gases

534

(2)

Concluding Remarks

536

(7)

References

536

(7)

High Voltage Phenomena

543

(34)

Types of Voltage

543

(1)

High Direct Voltage Generation

544

(3)

High Alternating Voltage Generation

547

(1)

High Impulse Voltage Generation

548

(4)

Ionization in Alternating Fields

552

(2)

Sparking Voltages

554

(23)

Atmospheric Air

555

(1)

Direct Voltages

555

(2)

Alternating Voltages

557

(1)

Lightning Impulse Voltages

558

(2)

Switching Impulse Voltages

560

(3)

Sulphur Hexafluoride (SF6)

563

(1)

Breakdown Voltage

563

(3)

Particle-Initiated Breakdown

566

(3)

Volt-Time Characteristics

569

(4)

References

573

(4)

Ionization in E x B Fields

577

(38)

List of Symbols

577

(2)

Brief Historical Note

579

(1)

Electron Motion in Vacuum in E x B Fields

580

(2)

Effective Reduced Electric Field (EREF)

582

(3)

Experimental Setup

585

(1)

Ionization Coefficients

585

(3)

Experimental Data

588

(8)

Air

588

(2)

Argon

590

(1)

Hydrogen

591

(1)

Nitrogen

592

(3)

Oxygen

595

(1)

Secondary Ionization Coefficient

596

(2)

Sparking Potentials

598

(4)

Uniform Electric Fields

598

(3)

Nonuniform Electric Fields

601

(1)

Time Lags in E x B Crossed Fields

602

(5)

Computational Methods

607

(3)

Effective Collision Frequency

610

(2)

Concluding Remarks

612

(3)

References

612

(3)

High Frequency Discharges

615

(26)

Basic Plasma Phenomena

615

(3)

Debye Length

618

(1)

Bohm Sheath Model

619

(1)

Plasma Frequency

620

(2)

Plasma Conductivity

622

(1)

Ambipolar Diffusion

622

(1)

RF Plasma

622

(5)

Experimental Studies

624

(3)

Power Absorbed

627

(5)

Glow Region

628

(1)

Sheath--Glow Boundary

628

(1)

Sheath

629

(1)

Discussion

630

(2)

Microwave Breakdown

632

(4)

Laser Breakdown

636

(2)

Concluding Remarks

638

(3)

References

638

(3)

Appendix 1

641

(2)

Appendix 2

643

(12)

Appendix 3

655

(2)

Appendix 4

657

(4)

Appendix 5

661

(2)

Appendix 6

663

(2)

Appendix 7

665

(2)

Index

667

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Gaseous Electronics: Theory and Practice

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Table of Contents

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