Handbook of Silicon Based Mems Materials and Technologies
, by Tilli, Markku; Paulasto-krockel, Mervi; Petzold, Matthias; Theuss, Horst; Motooka, TeruakiNote: Supplemental materials are not guaranteed with Rental or Used book purchases.
- ISBN: 9780128177860 | 0128177861
- Cover: Paperback
- Copyright: 4/24/2020