High-Vacuum Technology: A Practical Guide,

Offering a basic understanding of each important topic in vacuum science and technology, this book concentrates on pumping issues, emphasizes the behavior of vacuum pumps and vacuum systems, and explains the relationships between pumps, instrumentation and high-vacuum system performance. The book delineates the technical and theoretical aspects of the subject without getting in too deep. It leads readers through the subtleties of vacuum technology without using a dissertation on mathematics to get them there. An interesting blend of easy-to-understand technician-level information combined with engineering data and formulae, the book provides a non-analytical introduction to high vacuum technology.

Preface to the Second Edition

iii

(2)

Preface to the First Edition

v

Chapter 1 Introduction

1

(14)

1.1 Nature of Vacuum

1

(1)

1.2 Scope of Vacuum Science and Technique

2

(1)

1.3 Uses and Applications of Vacuum Technology

3

(1)

1.4 Production of Vacuum

4

(1)

1.5 Brief History of Development

5

(1)

1.6 History of Vacuum Pumps

6

(6)

References

12

(3)

Chapter 2 Properties of Gases

15

(26)

2.1 Pressure and Density

15

(1)

2.2 Atomic Numbers and Distances

16

(1)

2.3 Basic Gas Law

17

(2)

2.4 Velocities and Temperature of Gases

19

(3)

2.5 Vapors and Vapor Pressure

22

(2)

2.6 Evaporation

24

(1)

2.7 Adsorption and Desorption

25

(5)

2.8 Gas Content of Materials

30

(1)

2.9 Outgassing

31

(1)

2.10 Water Vapor

32

(7)

References

39

(2)

Chapter 3 Fluid Flow and Pumping Concepts

41

(36)

3.1 Pressure and Flow

41

(2)

3.2 Mass Flow and Volume Flow

43

(2)

3.3 Flow Regimes

45

(2)

3.4 Flow Through Nozzles and Diffusers

47

(3)

3.5 Molecular Flow

50

(5)

3.6 Conductance

55

(3)

3.7 Pumping Speed

58

(4)

3.8 Pumps and Compressors

62

(4)

3.9 Fluid Flow in Small Passages

66

(9)

References

75

(2)

Chapter 4 Vacuum Systems

77

(60)

4.1 Vacuum Chamber Design

77

(4)

4.2 Evacuation and Process Gas Pumping

81

(2)

4.3 Evacuation Time

83

(12)

4.4 Ultimate Pressure

95

(1)

4.5 Conductance Calculations

96

(19)

4.6 Outgassing Effects

115

(2)

4.7 Pumping System Design

117

(4)

4.8 Operation of High-Vacuum Systems

121

(8)

4.9 Estimation of Pressure-Time Progress During Evacuation

129

(5)

References

134

(3)

Chapter 5 Coarse Vacuum Pumps

137

(70)

5.1 Introduction

137

(5)

5.2 Rotary Vane Pumps

142

(2)

5.3 Performance Characteristics

144

(4)

5.4 Ultimate Pressure

148

(5)

5.5 Condensable Vapors and Gas Ballast

153

(1)

5.6 Oils and Backstreaming

154

(3)

5.7 Operation and Maintenance

157

(5)

5.8 Other Coarse Vacuum Pumps

162

(8)

5.9 Oil-Free Vacuum Pumps

170

(33)

References

203

(4)

Chapter 6 Vapor Jet (Diffusion) Pumps

207

(62)

6.1 Introduction

207

(1)

6.2 Pumping Mechanism

208

(5)

6.3 Basic Design

213

(3)

6.4 Basic Performance and Operation

216

(2)

6.5 Pumping Fluids

218

(3)

6.6 Performance Characteristics

221

(22)

6.7 Other Performance Aspects

243

(7)

6.8 Baffles and Traps

250

(12)

6.9 Maintenance

262

(5)

References

267

(2)

Chapter 7 Turbomolecular Pumps

269

(50)

7.1 Introduction

269

(2)

7.2 Molecular Drag Pumps

271

(15)

7.3 Turbomolecular Pumps

286

(28)

7.4 Summary of Properties

314

(3)

References

317

(2)

Chapter 8 Cryogenic Pumps

319

(34)

8.1 Basic Principles of Operation

319

(2)

8.2 Cryosorption Pumping

321

(1)

8.3 Gaseous Helium Cryopumps

322

(23)

8.4 Large Cryopumps

345

(1)

8.5 Water Vapor Pumps

345

(6)

References

351

(2)

Chapter 9 Gettering and Ion Pumping

353

(30)

9.1 Gettering Pumps

353

(7)

9.2 Sputter-ion Pumps

360

(3)

9.3 Basic Performance of Sputter-ion Pumps

363

(2)

9.4 Pump Types and Performance with Different Gases

365

(4)

9.5 Operation of Ion Pumps

369

(3)

9.6 Nonevaporated Getter (NEG) Pumps

372

(2)

9.7 Combination Pumps

374

(2)

9.8 Clean Roughing Systems

376

(5)

References

381

(2)

Chapter 10 Overloading of Vacuum Pumps

383

(22)

10.1 Introduction

383

(2)

10.2 Volume Flow and Mass Flow

385

(3)

10.3 Cross-over Pressure

388

(6)

10.4 Throughput Limits of Vapor Jet Pumps

394

(3)

10.5 Mass Flow Limits of Turbine-type Pumps

397

(4)

10.6 Similarities Between Pumps

401

(1)

10.7 Cryopumps and Ion-getter Pumps

402

(2)

References

404

(1)

Chapter 11 Ultrahigh Vacuum

405

(26)

11.1 Introduction

405

(1)

11.2 Degassing by Baking

406

(1)

11.3 All-Metal Systems and Components

407

(4)

11.4 Throughput-type Pumps and Ultrahigh Vacuum

411

(16)

11.5 Capture Pumps

427

(2)

References

429

(2)

Chapter 12 Vacuum Gauges and Gas Analyzers

431

(40)

12.1 Introduction

431

(1)

12.2 Force-measuring Gauges

432

(6)

12.3 Heat Transfer Gauges

438

(4)

12.4 Spinning Rotor Gauges

442

(2)

12.5 Ionization Gauges

444

(16)

12.6 New Trends of Gauges and Sensors

460

(2)

12.7 Mass Spectrometers or Partial Pressure Gauges

462

(7)

References

469

(2)

Chapter 13 Leak Detection

471

(44)

13.1 Introduction

471

(3)

13.2 Sizes of Leaks and Units of Measurement

474

(5)

13.3 Methods of Leak Detection

479

(14)

13.4 Helium Mass Spectrometer Leak Detectors

493

(20)

References

513

(2)

Appendix

515

(32)

Index

547

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High-Vacuum Technology: A Practical Guide, Second Edition

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High-Vacuum Technology: A Practical Guide, Second Edition

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