Inkjet-based Micromanufacturing
, by Brand, Oliver; Fedder, Gary K.; Hierold, Christofer; Korvink, Jan G.; Tabata, Osamu; Smith, Patrick J.; Shin, Dong H.
- ISBN: 9783527319046 | 3527319042
- Cover: Hardcover
- Copyright: 5/14/2012
Inkjet-based Micromanufacturing Inkjet technology goes way beyond putting ink on paper: it enables simpler, faster and more reliable manufacturing processes in the fields of micro- and nanotechnology. Modern inkjet heads are per se precision instruments that deposit droplets of fluids on a variety of surfaces in programmable, repeating patterns, allowing, after suitable modifications and adaptations, the manufacturing of devices such as thin-film transistors, polymer-based displays and photovoltaic elements. Moreover, inkjet technology facilitates the large-scale production of flexible RFID transponders needed, eg, for automated logistics and miniaturized sensors for applications in health surveillance. The book gives an introduction to inkjet-based micromanufacturing, followed by an overview of the underlying theories and models, which provides the basis for a full understanding and a successful usage of inkjet-based methods in current microsystems research and development Overview of Inkjet-based Micromanufacturing: Thermal Inkjet Theory and Modeling Post-Printing Processes for Inorganic Inks for Plastic Electronics Applications Inkjet Ink Formulations Inkjet Fabrication of Printed Circuit Boards Antennas for Radio Frequency Identification Tags Inkjet Printing for MEMS
Jan G. Korvink holds a Chair for Microsystems Engineering at the University of Freiburg, Germany, where he also directs the Freiburg Institute for Advanced Studies - FRIAS. He has co-authored more than 160 papers in scientific journals, as well as numerous conference papers, book chapters and a book on semiconductors for engineers. His research interests cover the modeling, simulation and low cost fabrication of MEMS/NEMS, and applications in magnetic resonance. In 2011 he received a European Research Council (ERC) Advanced Grant, the Red Dot Design Concept Award and the University of Freiburg Teaching Award.
Patrick J. Smith is a Lecturer in Manufacturing Technology for the University of Sheffield, UK. He has published over 40 journal and conference papers, and has 3 patents. His main research interests are concerned with reactive inkjet printing, controlled crystallisation using inkjet and additive manufacture.
Dong-Youn Shin is Assistant Professor at the Pukyong National University in Busan, South Korea. Before his appointment, he was research engineer at LG Chem Research Park and then senior research scientist in the division of nanomechanical systems at the Korean Institute of Machinery and Materials in South Korea. He holds 38 patents and over 70 conference and journal papers. His research interests lie in maskless lithography and fine pattern generation for displays and electronics with the piezo inkjet printing technology.
Patrick J. Smith is a Lecturer in Manufacturing Technology for the University of Sheffield, UK. He has published over 40 journal and conference papers, and has 3 patents. His main research interests are concerned with reactive inkjet printing, controlled crystallisation using inkjet and additive manufacture.
Dong-Youn Shin is Assistant Professor at the Pukyong National University in Busan, South Korea. Before his appointment, he was research engineer at LG Chem Research Park and then senior research scientist in the division of nanomechanical systems at the Korean Institute of Machinery and Materials in South Korea. He holds 38 patents and over 70 conference and journal papers. His research interests lie in maskless lithography and fine pattern generation for displays and electronics with the piezo inkjet printing technology.
List of Contributors XIII
1 Overview of Inkjet-Based Micromanufacturing 1
David Wallace
1.1 Introduction 1
1.2 Inkjet Technology 1
1.2.1 Continuous Mode Inkjet (CIJ) Technology 2
1.2.2 Demand Mode Inkjet Technology 2
1.3 Fluid Requirements 3
1.4 Pattern Formation: Fluid/Substrate Interaction 5
1.5 Micromanufacturing 6
1.5.1 Introduction 6
1.5.2 Limitations and Opportunities in Micromanufacturing 7
1.5.3 Benefits of Inkjet in Microfabrication 8
1.6 Examples of Inkjet in Micromanufacturing 9
1.6.1 Chemical Sensors 9
1.6.2 Optical MEMS Devices 10
1.6.3 Bio-MEMS Devices 12
1.6.4 Assembly and Packaging 13
1.7 Conclusions 14
Acknowledgments 14
References 14
2 Combinatorial Screening of Materials Using Inkjet Printing as a Patterning Technique 19
Anke Teichler, Jolke Perelaer, and Ulrich S. Schubert
2.1 Introduction 19
2.2 Inkjet Printing – from Well-Defined Dots to Homogeneous Films 20
2.3 Thin-Film Libraries Prepared by Inkjet Printing 25
2.4 Combinatorial Screening of Materials for Organic Solar Cells 28
2.5 Conclusion and Outlook 34
References 35
3 Thermal Inkjet 41
Naoki Morita
3.1 History of Thermal Inkjet Technology 41
3.2 Market Trends for Inkjet Products and Electrophotography 42
3.3 Structures of Various TIJ Heads 43
3.4 Research on Rapid Boiling and Principle of TIJ 44
3.5 Inkjetting Mechanism of TIJ 47
3.6 Basic Jetting Behavior of TIJ 48
3.6.1 Input Power Characteristics 48
3.6.2 Frequency Characteristics 49
3.6.3 Dependency on Temperature 49
3.7 TIJ Behavior Analysis Using Simulation 51
3.7.1 Cylindrical Thermal Propagating Calculation Based on the Finite Element Method (Software Name: Ansys) 51
3.7.2 Fluidic Free Boundary Calculation Based on the Finite Differentiation Method (Software name: Flow3D) 51
3.8 Issues with Reliability in TIJ 53
3.9 Present and Future Evolution in TIJ Technology 54
References 55
4 High-Resolution Electrohydrodynamic Inkjet 57
Park Jang-Ung and John A. Rogers
4.1 Introduction 57
4.2 Printing System 57
4.3 Control of Jet Motions 59
4.4 Drop-on-Demand Mode Printing 60
4.5 Versatility of Printable Materials and Resolutions 62
4.6 Applications in Electronics and Biotechnology 64
4.7 High-Resolution Printing of Charge 69
References 70
5 Cross Talk in Piezo Inkjet 73
Herman Wijshoff
5.1 Introduction 73
5.2 Electrical Cross Talk 73
5.3 Direct Cross Talk 74
5.4 Pressure-Induced Cross Talk 76
5.5 Acoustic Cross Talk 78
5.6 Printhead Resonance 81
5.7 Residual Vibrations 83
References 84
6 Patterning 87
Patrick J. Smith and Jonathan Stringer
6.1 Introduction 87
6.1.1 Droplet Impact and Final Droplet Radius 88
6.1.2 Evaporation of Inkjet-Printed Droplets at Room Temperature 90
6.1.3 Morphological Control for Ink Droplets, Lines, and Films 91
6.2 Conclusion 94
References 95
7 Drying of Inkjet-Printed Droplets 97
Hans Kuerten and Daniel Siregar
7.1 Introduction 97
7.2 Modeling of Drying of a Droplet 98
7.2.1 Fluid Model 98
7.2.2 Lubrication Approximation 99
7.2.3 Solute Concentration 101
7.2.4 Evaporation Velocity 102
7.2.5 Numerical Method 103
7.3 Results 103
7.3.1 Droplet Shape Evolution 104
7.3.2 Layer Thickness 106
7.3.3 Effect of Diffusion 108
Acknowledgments 109
References 109
8 Postprinting Processes for Inorganic Inks for Plastic Electronics Applications 111
Jolke Perelaer
8.1 Introduction 111
8.1.1 Inkjet Printing 111
8.1.2 Printed Electronics 111
8.2 Inkjet Printing and Postprinting Processes of Metallic Inks 112
8.2.1 Choice of Metal 112
8.2.2 Postprinting Processes to Convert Inorganic Precursor Ink 115
8.2.3 Conventional Sintering Techniques 116
8.2.4 Alternative and Selective Sintering Methods 116
8.2.5 Room-Temperature Sintering 119
8.3 Conclusions and Outlook 121
Acknowledgments 122
References 122
9 Vision Monitoring 127
Kye-Si Kwon
9.1 Introduction 127
9.2 Measurement Setup 127
9.3 Image Processing 130
9.4 Jetting Speed Measurement 134
9.5 Head Normalization and Condition Monitoring 139
9.6 Meniscus Motion Measurement and Its Application 141
References 144
10 Acoustic Monitoring 145
Herman Wijshoff
10.1 Introduction 145
10.2 Self Sensing 145
10.3 Measuring Principle 146
10.4 Drop Formation, Refill, and Wetting 150
10.5 Dirt 152
10.6 Air Bubbles 153
10.7 Printhead Control 156
References 157
11 Equalization of Jetting Performance 159
Man-In Baek and Michael Hong
11.1 Equalization of the Droplet Volume on the Fly 160
11.1.1 Components of a Drop Watcher 160
11.1.2 Equalization through Volume Control 160
11.1.3 Results of the Droplet Volume Measurement and Equalization Process 161
11.1.4 Speed Equalization 164
11.1.5 Problems with the Droplet Equalization Methods on the Fly 164
11.1.5.1 Distortion of the Captured Droplet Images 166
11.1.5.2 Relation between Droplet Volume and Speed 166
11.2 Droplet Volume Equalization with Sessile Droplets 166
11.2.1 Equalizing the Droplet Volume with the Measurement of Sessile Droplets 167
11.2.2 Results of the Sessile Droplet Measurement and Equalization Process 168
11.2.3 Usefulness of the Sessile Droplet Measurement and Equalization Process 169
11.2.4 The Droplet Volume Equalization Process Using Light Transmittance 170
11.2.5 Result of the Droplet Volume Equalization Process Using Light Transmittance 171
Further Reading 171
12 Inkjet Ink Formulations 173
Alexander Kamyshny and Shlomo Magdassi
12.1 Introduction 173
12.2 Ink Formulation 174
12.2.1 Functional Materials 176
12.2.2 Solvents 177
12.2.2.1 Solvent-Based Inks 177
12.2.2.2 Water-Based Inks 178
12.2.3 Hot-Melt (Phase-Change) Inks 178
12.2.4 UV-Curable Inks 178
12.3 Ink Parameters and Additives 179
12.3.1 Rheology Control 179
12.3.2 Surface Tension Modifiers 180
12.3.3 Electrolytes and pH 180
12.3.4 Foaming and Defoamers 181
12.3.5 Humectants 181
12.3.6 Binders 181
12.3.7 Biocides 182
12.3.8 Examples of Inkjet Ink Formulations 182
12.4 Jetting Performance 182
12.4.1 Drop Formation 183
12.4.2 Ink Latency 183
12.4.3 Recoverability 184
12.4.4 Ink Supply 184
12.5 Ink Interaction with Substrates 185
12.6 Nongraphic Applications 186
12.7 Conclusions 187
References 187
13 Issues in Color Filter Fabrication with Inkjet Printing 191
Dong-Youn Shin and Kenneth A. Brakke
13.1 Introduction 191
13.2 Background 191
13.3 Comparison of Printing Technologies 195
13.4 Printing Swathe due to Droplet Volume Variation 199
13.5 Subpixel Filling with a Designed Surface Energy Condition 204
13.6 Other Technical Issues 212
13.7 Conclusion 213
References 213
14 Application of Inkjet Printing in High-Density Pixelated RGB Quantum Dot-Hybrid LEDs 217
Hanna Haverinen and Ghassan E. Jabbour
14.1 Introduction 217
14.2 Background 218
14.3 Experimental Procedure and Results 220
14.3.1 Role of Droplet Formation 221
14.3.2 Atomic Force Microscopy 222
14.3.3 Electroluminescence 225
14.4 Inkjet-Printed, High-Density RGB Pixel Matrix 229
14.5 Conclusion 234
Acknowledgment 234
References 234
Further Reading 236
15 Inkjet Printing of Metal Oxide Thin-Film Transistors 237
Jooho Moon and Keunkyu Song
15.1 Introduction 237
15.2 Materials for Metal Oxide Semiconductors 237
15.3 Inkjet Printing Issues 239
15.3.1 Ink Printability 239
15.3.2 Influence of Substrate Preheat Temperature 242
15.4 Solution-to-Solid Conversion by Annealing 247
15.5 All-Oxide Invisible Transistors 251
15.6 Summary 254
References 254
16 Inkjet Fabrication of Printed Circuit Boards 257
Thomas Sutter
16.1 Introduction 257
16.2 Traditional Printed Circuit Board Processes 257
16.3 Challenges for Inkjet in Printed Circuit Boards 258
16.4 Legend-Marking Processes 261
16.4.1 Cost Comparison 262
16.4.2 Materials for Legend Printing 262
16.5 Innerlayer Copper Circuit Patterning 263
16.5.1 Materials for Copper Etch Resists 264
16.5.2 Substrate Modification 265
16.6 Copper Plating Resist 266
16.7 Waste Reduction Using Inkjet Printing 268
16.8 Solder Mask Printing 269
16.9 Metallic Inks 273
16.10 Theoretical Printing Example for PCB Manufacturing 275
16.11 Digital Printing Alternatives to Inkjet Fabrication 276
16.12 Future Applications for Inkjet in Printed Circuit Boards 276
References 277
17 Photovoltaics 279
Heather A.S. Platt and Maikel F.A.M. van Hest
17.1 Introduction 279
17.2 Device Structures 280
17.3 Small- and Large-Area Printing for Photovoltaics 283
17.4 Commercial Inkjet for Photovoltaics 289
17.5 Summary and Perspective 291
References 292
18 Inkjet Printed Electrochemical Sensors 295
Aoife Morrin
18.1 Introduction 295
18.2 Printed Sensor Manufacturing 297
18.3 Inkjet Printing of Sensor Components 298
18.3.1 Substrates 299
18.3.2 Conducting Tracks 300
18.3.3 Transducer Materials 300
18.3.4 Biomolecules 305
18.4 Inkjet-Printed Sensor Applications 306
18.5 Future Commercial Projection 306
Abbreviations 309
References 309
19 Antennas for Radio Frequency Identification Tags 313
Vivek Subramanian
19.1 Introduction 313
19.1.1 Introduction to RFID 313
19.1.1.1 RFID Tag Classification 314
19.1.2 Applications of Printing to RFID Antenna Production 317
19.1.2.1 An Overview of RFID–HF versus UHF 318
19.1.2.2 Silicon-Based RFID Tag Construction – from Chip to Tag 319
19.2 Printed Antennas 319
19.2.1 HF Tag Antenna Considerations 320
19.2.2 UHF Tag Antenna Considerations 321
19.2.3 Application of Printing to Antenna Fabrication 322
19.2.4 Materials for Printed Antennas 323
19.2.4.1 Metallic Pastes 324
19.2.4.2 Particle-Based Inks 325
19.2.4.3 Organometallic Precursors 326
19.3 Summary of Status and Outlook for Printed Antennas 327
References 328
20 Inkjet Printing for MEMS 331
K. Pataky, V. Auzelyte, and J. Brugger
20.1 Introduction 331
20.2 Photolithography and Etching 331
20.2.1 Photolithography 332
20.2.2 Etching 332
20.3 Direct Materials Deposition 333
20.4 Optical MEMS 336
20.5 MEMS Packaging 339
20.6 Functionalization and Novel Applications 340
20.7 Conclusion 342
References 342
21 Inkjet Printing of Interconnects and Contacts Based on Inorganic Nanoparticles for Printed Electronic Applications 347
Jolke Perelaer and Ulrich S. Schubert
21.1 Introduction 347
21.2 Inkjet Printing of Metallic Inks for Contacts and Interconnects 348
21.2.1 Inkjet Printed Contacts and Interconnects for Microelectronic Applications 348
21.3 Inkjet Printing in High Resolution 351
21.3.1 Surface Wetting and Ink Modifications 351
21.3.2 Reduced Printed Droplet Diameter 353
21.3.3 Physical Surface Treatment 357
21.3.4 Inkjet-Printed Ionogels 359
21.4 Conclusions and Outlook 361
Acknowledgments 362
References 362
Index 365
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