Introduction to Microsystem Technology A

Translated from the acclaimed German text published in February 2006, Introduction to Microsystem Technology: A Guide for Students begins with a full introduction to the subject, outlining application fields and development trends. The functional principle, components, and elements of a yaw rate sensor are also explained. The authors examine the topics of scaling, materials (including silicon, polymers and thin films), microfabrication technology, packaging, functional and shaped elements, sensors and actuators, and microsystem design, and analyze the influence of technology parameters on microsystem properties.

Gerald Gerlach is currently a Professor for Solid-state Sensors at the Dresden University of Technology, Germany, a post he has held since 1996. His research interests include micromachined solid-state sensors (pressure, humidity, chemical) and sensor fabrication techniques, and he teaches courses in Microtechnology and Sensors. He has also held positions as a Researcher at different German companies making micromachined pressure sensors for biomedical applications, and is active in the sensor and measuring technology fields, having been Chairman of the German Association of University Professors in Measuring Technology (AHMT) and Vice-President of the German Society for Measurement and Control (GMA) since 2002. He has co-authored the German version of this book Einführung in die Mikrosystemtechnik (Hanser, 2006) and has contributed chapters to the book Functional Elements in Precision Engineering (Hanser) and Fabrication in Precision Engineering and Microtechnology (Hanser, 1995). He has also written over 250 journal and conference papers, and holds more than 35 patents.

Wolfram Dötzel is currently Professor for Microsystems and Precision Engineering at Chemnitz University of Technology, also holding the position of Vice-President for Research at the university. His main research fields are in the modelling, design and simulation of micromechanical components, characterization and testing of micromechanical components by experimental methods, and adaptation of methods and principles of precision engineering for microsystems. He teaches courses in Microsystems, reliability and the design of devices and has previously co-authored Einführung in die Mikrosystemtechnik (Hanser, 2006) with Gerald Gerlach. He has also authored a chapter in the book Manual of Data Acquisition (Verlag Technik, 1984), more than 130 publications in journals and conference proceedings on micromechanical and precision engineering components as well as modelling, simulation, and characterization, and holds 8 patents.

List of Symbols
Introduction	p. 1
Scaling and Similarity	p. 17
Materials	p. 27
Microfabrication	p. 67
Packaging	p. 155
Function and Form Elements in Microsystem Technology	p. 171
Sensors and Actuators	p. 207
Design of Microsystems	p. 255
Effect of Technological Processes on Microsystem Properties	p. 283
The Future of Microsystems	p. 295
Physical Constants	p. 331
Coordinate Transformation	p. 333
Properties of Silicon Dioxide and Silicon Nitride Layers	p. 339
Nomenclature of Thin-film Processes	p. 341
Adhesion of Surface Micromechanical Structures	p. 343
Index	p. 347
Table of Contents provided by Blackwell. All Rights Reserved.

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Introduction to Microsystem Technology A Guide for Students

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Table of Contents

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