Micro- and Nano-Electro-Mechanical Resonant Transistors

Describes state-of-the-art resonant transistors, including a review of their potential applications This book explains the design, analysis and application of hybrid Microelectromechanical systems (MEMS) and Complementary Metal-Oxide-Semiconductor (CMOS) resonator devices; currently a hot topic in the semiconductor industry. It also presents the technology, design and modelling of state-of-the-art resonant transistors and their applications as a micromechanical resonator with internal gain, with a particular focus on time and frequency reference applications. Includes state-of-the-art reviews and selected lists of references in each chapter. Provides descriptions of basic physics for Field-effect Transistor (FET) based motion detection. Reports existing technology solutions to implement movable FETs for in-plane and out-of-plane motion detection. Highlights the main differences with the existing solid-state technology and provides engineering solutions for fast and successful implementation. Discusses the potential of the technology compared to other known transduction principles.