Microfluidic Technology and Applications

Discusses different modelling techniques in microfluidics (FEM and CFD). Every reader will have an easy start to model any kind of microfluidic device. Presents the necessary fabrication technologies and examples of the latest microfluidic devices and systems. Microfluidics is a very new research area in microelectro-mechanical systems (MEMS). This book introduces the theory and practice of microfluidic technology. The content is designed to be of value to engineers with different backgrounds working in the area of microsystem technology. The book includes the necessary fabrication technologies and examples of the latest microfluidic devices and systems that have been realised by a worldwide community of researchers. It covers all aspects of microfluidic theory and describes the breath-taking developments in this field.

Michael Koch and Alan Evans are the authors of Microfluidic Technology and Applications, published by Wiley.

List of Figures

xii

List of Tables

xxi

Introduction

1

(2)

Theory of Microfluidic Flow

3

(19)

Fluid Mechanics

3

(17)

One-dimensional Nonviscous Flow

4

(1)

Two-dimensional Laminar Viscous Flow

5

(2)

Dimensional Analysis

7

(1)

Similitude

8

(1)

Turbulent Flow

9

(2)

Flow in a Diffuser and Nozzle

11

(6)

Three-dimensional Fluid Flow

17

(3)

Microfluidics: Differences between Microscopic and Macroscopic Flow

20

(2)

Laminar and Turbulent Flow Regimes

20

(1)

Practical Problems in Liquid Flow at Small Dimensions

21

(1)

Mechanical Aspects of Microfluidic Devices

22

(35)

Mechanics of Materials

22

(15)

Elementary Theory of Elasticity

22

(3)

Bending of Beams and Bridges

25

(1)

Basic Mechanics

26

(3)

Equations for Cantilevers and Clamped Beams

29

(3)

Natural Frequencies

32

(1)

Mechanics of Plates

33

(1)

Fundamental Differential Equation

33

(1)

Rectangular Plates

34

(2)

Circular Plates

36

(1)

Natural Frequencies

36

(1)

Actuation Techniques for Microfluidic Devices

37

(20)

The Piezoelectric Effect

37

(1)

Theory of Piezoelectricity

37

(4)

Applications in Micromechanics

41

(6)

Bimetallic Actuation Technique

47

(2)

Shape-memory Effect in Micromechanical Applications

49

(1)

Electrostatic Actuation Technique

50

(1)

Thermopneumatic Actuators

51

(2)

Magnetic Microactuators

53

(1)

Evaluation of the Actuation Techniques for Microfluidics

54

(3)

Modelling Techniques

57

(49)

The Finite Element Method: an Introduction

57

(3)

Numerical Integration of Differential Equations

57

(3)

One-dimensional Mechanical Finite Element Method

60

(1)

Computational Fluid Mechanics

61

(3)

Finite Difference Method

62

(1)

Finite Element Method (FEM)

63

(1)

Use of FEM Programs

64

(7)

Examples for mechanical FEM

66

(2)

Examples for Computational Fluid Dynamics (CFD)

68

(3)

Coupled FEM and CFD Simulators in Microfluidics

71

(7)

Description of the Simulation Method

73

(3)

Simulation Results and Comparison with Measurements

76

(2)

Analytical Approximations

78

(28)

Micromachined Cantilever Valves

79

(1)

Simple Analytical Approach for the Volume Flow

79

(1)

Coupled Analytical Approximation

80

(3)

Membrane-Actuated Pumps

83

(1)

Continuity Equation and Quasi-Static Model

83

(5)

Pump Model with Dynamic Valve Approximation

88

(6)

Pump Model with Behavioural Model of the Valve

94

(4)

Comparison of the different Dynamic Solvers

98

(1)

Thermal Flowsensors

99

(7)

Fabrication Technology

106

(45)

Introduction

106

(1)

Processing Techniques in Microelectronics

107

(18)

Introduction

108

(1)

Crystal Growth

108

(3)

Lithography

111

(2)

Oxidation of Silicon

113

(2)

Physical and Chemical Vapour Deposition

115

(1)

Chemical Vapour Deposition

115

(4)

Physical Vapour Deposition

119

(2)

Diffusion and Implantation of Dopants

121

(2)

Dry and Wet Etching Techniques

123

(2)

Micromechanical Fabrication Methods

125

(14)

Wet Isotropic and Anisotropic Etching of Silicon

125

(5)

Bonding Techniques for Silicon and Pyrex

130

(2)

Surface Micromachining

132

(2)

Deep Dry Etching

134

(1)

Ion Beam Milling

135

(2)

Sol-Gel Deposition

137

(2)

Special Microfluidic Processes

139

(12)

Thick-Film-On-Silicon Technique

139

(1)

Introduction to Thick-Film Technology

139

(2)

Process Sequence for a Piezoelectric Actuator

141

(2)

Diffusion of Lead into Silicon

143

(2)

Characterisation of the Inks

145

(1)

Isotropic Etching of Pyrex

146

(2)

LIGA Technique

148

(3)

Microfluidic Devices I: Flow Control

151

(66)

Introduction

151

(1)

Inkjet Nozzles and Flow Amplification

151

(8)

Nozzles for Inkjet and Fuel Injection

152

(2)

Microfluidic Amplifiers

154

(3)

Micromachined Turbines

157

(2)

Active and Passive Valves

159

(18)

Passive One-Way Valves in Bulk and Surface Micromachining

159

(1)

Cantilever Valves

159

(5)

Diaphragm Valves

164

(6)

Bivalvular Valves

170

(1)

Diffuser/Nozzle Valve

171

(2)

Actuation Techniques for Valves

173

(4)

Micromachined Pumps

177

(31)

Membrane-Actuated Pumps

177

(1)

Overview

178

(4)

Thermopneumatic Pumps

182

(1)

Piezoelectric Pumps

183

(14)

Bimetallic actuated Pumps

197

(1)

Electrostatically actuated Micropumps

198

(2)

Pumps with the Shape-Memory Effect

200

(1)

Electric Field Actuated Pumps

201

(1)

Electrohydrodynamic Pumps

201

(3)

Electroosmotic Pumps

204

(2)

Other Actuation Techniques

206

(1)

In-Line Gear Pumps

206

(1)

Travelling Flexural Wave (Ultrasonic)

207

(1)

Physical Sensors for Microfluidics

208

(9)

Flowsensors

208

(1)

Drag-force Flowsensors

208

(2)

Differential Pressure Method

210

(1)

Thermal Flowsensors

210

(2)

Electrohydrodynamic Flowsensors

212

(1)

High-speed X-Ray Micro-Imaging

213

(1)

Pressure Sensors

213

(1)

Piezoresistive Pressure Sensors

213

(2)

Capacitive Pressure Sensors

215

(1)

Resonating Pressure Sensors

215

(2)

Microfluidic Devices II: Particles and Chemistry

217

(46)

Introduction

217

(1)

Particle and Cell Handling with Microfluidics

217

(10)

Introduction to Dielectrophoresis

217

(1)

Particle/Cell Trapping

218

(1)

Transportation and Separation of Particles

218

(4)

Particle Counting

222

(5)

Mixing and Chemistry on the Micronscale

227

(11)

Diffusive Mixing Principle

227

(8)

Chaotic Mixing Processes

235

(1)

Microreactors and Chemistry on a Chip

236

(2)

Chemical Analysis with MEMS

238

(11)

Introduction

238

(5)

Flow Injection Analysis

243

(1)

Liquid and Gas Chromatography

243

(2)

Capillary Electrophoresis

245

(3)

DNA Analysis based on MEMS

248

(1)

Biochemical Sensors for Microfluidics

249

(14)

Semiconductor Devices used for Chemical Sensors

250

(1)

Chemdiodes

250

(1)

Chemfet

251

(2)

Metal Oxide Gas Sensors

253

(4)

Catalytic Gas-sensors

257

(1)

Optical Sensing Techniques for Chemicals

258

(1)

Biosensors

259

(4)

Integrated Microfluidic Systems

263

(25)

Microsystems Technology

263

(5)

Advantages of Integration

263

(1)

Integration of Micromechanics and Microelectronics

264

(2)

Integration of Microfluidics and Microelectronics

266

(2)

Connection Systems for Microfluidic Devices

268

(6)

Vertical System Integration

268

(1)

Moulded Connection System

269

(1)

Silicon Tubing

270

(1)

Pyrex-Silicon Microfluidic Circuit Board

271

(3)

Applications of Integrated Microfluidic Devices

274

(13)

Micro Dosing Systems and Drug Delivery

274

(3)

Chemical Microplants

277

(2)

Medical, Chemical and Environmental Monitoring

279

(4)

Drug Discovery and Genetic Diagnostics

283

(4)

Conclusion

287

(1)

Abbreviations and Acronyms

288

(1)

References

289

(26)

Index

315

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Microfluidic Technology and Applications

Summary

Author Biography

Table of Contents

Supplemental Materials

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Microfluidic Technology and Applications

Summary

Author Biography

Table of Contents

Supplemental Materials

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