Modeling Mems and Nems

Designing small structures necessitates an understanding of various device behaviors. The way to gain that understanding is to build, analyze, and interpret the proper mathematical models. Through such models, this book illuminates micro- and nanoscale phenomena, and thereby facilitates the design and optimization of micro- and nanoscale devices. Each chapter focuses on a set of devices that share a common feature. The authors abstract that feature and present the mathematical tools needed to model it. This treatment not only provides the background and tools needed to design and optimize microdevices, but also helps develop the intuitive understanding that can lead to new and better designs and devices.

Introduction
MEMS and NEMS
A Capsule History of MEMS and NEMS
Dimensional Analysis and Scaling
Exercises
A Refresher on Continuum Mechanics
Introduction
The Continuum Hypothesis
Heat Conduction
Elasticity
Linear Thermoelasticity
Fluid Dynamics
Electromagnetism
Numerical Methods for Continuum Mechanics
Small is Different
The Backyard
Scaling
Systems
Exercises
Thermally Driven Systems
Introduction
Thermally Driven Devices
From PDE to ODE: Lumped Models
Joule Heating of a Cylinder
Analysis of Thermal Data Storage
Exercises
Modeling Elastic Structures
Introduction
Examples of Elastic Structures in MEMS/NEMS
The Mass on a Spring
Membranes
Beams
Plates
The Capacitive Pressure Sensor
Exercises
Modeling Coupled Thermal-Elastic Systems
Introduction
Devices and Phenomena in Thermal-Elastic Systems
Modeling Thermopneumatic Systems
The Thermoelastic Rod Revisited
Modeling Thermoelastic V-Beam Actuators
Modeling Thermal Bimorph Actuators
Modeling Bimetallic Thermal Actuators
Exercises
Modeling Electrostatic-Elastic Systems
Introduction
Devices Using Electrostatic Actuation
The Mass-Spring Model
Modeling General Electrostatic-Elastic Systems
Electrostatic-Elastic Systems - Membrane Theory
Electrostatic-Elastic Systems - Beam and Plate Theory
Analysis of Capacitive Control Schemes
Exercises
Modeling Magnetically Actuated Systems
Introduction
Magnetically Driven Devices
Mass-Spring Models
A Simple Membrane Micropump Model
A Small-Aspect Ratio Model
Exercises
Microfluidics
Introduction
Microfluidic Devices
More Fluidic Scaling
Modeling Squeeze Film Damping
Exercises
Beyond Continuum Theory
Introduction
Limits of Contiuum Mechanics
Devices and Systems Beyond Continuum Theory
Exercises
References
Appendices
Mathematical Results
Physical Constants
Index
Each chapter also contains Related Reading and Notes sections
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Modeling Mems and Nems

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Table of Contents

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Modeling Mems and Nems

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