Multi-Wafer Rotating Mems Machines

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Multi-Wafer Rotating Mems Machines by Lang, Jeffrey, 9781461424598
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  • ISBN: 9781461424598 | 1461424593
  • Cover: Paperback
  • Copyright: 3/3/2012

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The collaboration and research that was developed to produce the MIT Gas Turbine Engine are described in this book. Both the engine and generator are fabricated from silicon using a combination of bulk and surface microfabrication technologies. The book discusses the technical details that have gone into producing the engine and the overall systems-level tradeoffs, in particular its motor compressors and turbine generators, and the decisions that have been made.