Nanofabrication Handbook

A comprehensive resource for this rapidly emerging discipline, this book includes detailed discussions of the underlying theoretical basis, the resolution, patterns, and substrates used as well as applications. It builds upon current understanding of microfabrication, moving into the nano dimension and demonstrating how work at this level calls for a different process. Most notably, the book provides guidance on particular lithographic techniques that better fit specific research needs. It includes coverage of how to approach key problems in the decision-making process related to materials, methods, surface considerations, and more.