Particles on Surfaces: Detection, Adhesion and Removal, Volume 9

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ISBN: 9789067644358 | 9067644358
Cover: Nonspecific Binding
Copyright: 5/29/2006

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This volume chronicles the proceedings of the 9th International Symposium on Particles on Surfaces: Detection, Adhesion and Removal held in Philadelphia, PA, June 2004. The study of particles on surfaces is crucially important in a legion of diverse technological areas, ranging from microelectronics to biomedical to space.

Preface

vii

Part 1: Particle Detection/Analysis/Characterization and General Cleaning-Related Topics

Recent developments in imaging and analysis of micro- and nanosize particles and surface features

R. Kohli

(60)

Photodigital imaging as a means of monitoring particulate contamination on surfaces

R. Kaiser, J. Grilly and A. Kulczyk

(12)

Determination of residual particles on surfaces. An updated method for particle extraction using ultrasonics

S.B. Awad

(8)

Laser inactivation of surfaces and detection of bacteria

I.A. Watson, D.E.S. Stewart-Tull, R. Parton, I. Peden, A. Yeo, B.K. Tan and G. Ward

(12)

Laser-assisted nanofabrication on surfaces using micro- and nanoparticles

Y.F. Lu, L.P. Li, K.K. Mendu, Shi, D.W. Doerr and D.R. Alexander

(12)

Clean-then-assemble versus assemble-then-clean: Several comparisons

R.W. Welker

107

(20)

Development of a non-contact post-CMP cleaning process for copper

D.A. Koos, J. Svirchevski, D.J. Vitkavage, D.G. Hansen, K.A. Reinhardt, F. Huang, M. Mitchel and G. Zhang

127

(18)

Using ozonated DI water for pre-gate cleaning

L. Liu, I. Kashkoush, A. Walter and R. Novak

145

(8)

Decontamination of surrogate Pu-238 legacy wastes

R. Kaiser, J. Desrosiers and A. Kulczyk

153

(14)

Solar panel obscuration by dust and dust mitigation in the Martian atmosphere

M.K. Mazumder, A.S. Biris, C.E. Johnson, C.U. Yurteri, R.A. Sims, R. Sharma, K. Pruessner, S. Trigwell and J.S. Clements

167

(32)

Part 2: Particle Adhesion and Removal

Adhesion and friction of single micrometer-sized particles

M. Kappl, L. Heim, S. Ecke, M. Farshchi and H. Butt

199

(12)

The effect of laser-induced micro-roughness of textile fibers on adhesion and capture of micrometer-sized particles

T. Bahners, K. Opwis, T. Textor, W. Labuda and E. Schollmeyer

211

(14)

Advances in wafer cleaning and particle removal technology

K.A. Reinhardt

225

(18)

Particle removal challenges and solutions in semiconductor fabrication CMP processes

M.T. Andreas

243

(12)

Laser cleaning of model sub-micrometer particulate contaminants from Si surfaces

S.I. Kudryashov, S.D. Shukla and S.D. Allen

255

(12)

Removal of particles using the combined effect of laser-induced shock wave and explosive vaporization of liquid

D. Jang and D. Kim

267

(10)

Particle removal by attenuated total internal reflection of laser light

G. Dubé, A.J. Braundmeier, Jr. and J.D. Kelley

277

(14)

Removal of sub-100-nm particles from structured substrates with CO2 snow

J.C.J. van der Donck, R. Schmits, R.E. van Vliet and Ton (A.) G.T.M. Bastein

291

(12)

Particle removal by dense-phase fluids using ultrasonics

W.T. McDermott, G. Parris, D.V. Roth and C. Mammarella

303

(14)

Prediction of particle removal using surfactants

M.L. Free

317

(12)

Removal of micrometer-size particles from solid surfaces by an impinging air jet

K. Gotoh

329

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Particles on Surfaces: Detection, Adhesion and Removal, Volume 9

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Particles on Surfaces: Detection, Adhesion and Removal, Volume 9

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