Polymers for Microelectronics Resists and Dielectrics
, by Thompson, Larry F.; Willson, C. Grant; Tagawa, SeiichiNote: Supplemental materials are not guaranteed with Rental or Used book purchases.
- ISBN: 9780841227217 | 0841227217
- Cover: Hardcover
- Copyright: 5/5/1994
Presents recent advances in chemically amplified resists for deep UV, electron beam, and X-ray advanced lithographic technologies. Discusses top surface imaging and dry development resists. Examines the fundamental chemistry of radiation-sensitive materia