Porous Silicon Carbide and Gallium Nitride Epitaxy, Catalysis, and Biotechnology Applications

, by Feenstra, Randall M.; Wood, Colin E. C.

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ISBN: 9780470517529 | 0470517522
Cover: Hardcover
Copyright: 6/9/2008

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Porous Silicon Carbide and Gallium Nitride: Epitaxy, Catalysis, and Biotechnology Applicationspresents the state-of-the-art in knowledge and applications of porous semiconductor materials having a wide band gap. This comprehensive reference begins with an overview of porous wide-band-gap technology, and describes the underlying scientific basis for each application area. Additional chapters cover preparation, characterization, and topography; processing porous SiC; medical applications; magnetic ion behavior, and many more

Preface	p. xi
Porous SiC Preparation, Characterization and Morphology	p. 1
Introduction	p. 1
Triangular Porous Morphology in n-type 4H-SiC	p. 2
Crystal Anodization	p. 2
Description of the Porous Structure	p. 3
Model of the Morphology	p. 9
Nano-columnar Pore Formation in 6H-SiC	p. 15
Experimental	p. 15
Results	p. 16
Discussion	p. 18
Summary	p. 26
Acknowledgements	p. 27
References	p. 27
Processing Porous SiC: Diffusion, Oxidation, Contact Formation	p. 31
Introduction	p. 31
Formation of Porous Layer	p. 32
Diffusion in Porous SiC	p. 42
Oxidation	p. 47
Contacts to Porous SiC	p. 49
Acknowledgements	p. 53
References	p. 53
Growth of SiC on Porous SiC Buffer Layers	p. 55
Introduction	p. 55
SiC CVD Growth	p. 57
Growth of 3C-SiC on Porous Si via Cold-Wall Epitaxy	p. 58
Growth on Porous Si Substrates	p. 58
Growth on Stabilized Porous Si Substrates	p. 62
Growth of 3C-SiC on Porous 3C-SiC	p. 64
Growth in LPCVD Cold-wall Reactor	p. 64
Growth of 4H-SiC on Porous 4H-SiC	p. 67
Conclusion	p. 73
Acknowledgements	p. 74
References	p. 74
Preparation and Properties of Porous GaN Fabricated by Metal-Assisted Electroless Etching	p. 77
Introduction	p. 77
Creation of Porous GaN by Electroless Etching	p. 78
Morphology Characterization	p. 80
Porous GaN Derived from Unintentionally Doped Films	p. 80
Transmission Electron Microscopy (TEM) Characterization	p. 84
Luminescence of Porous GaN	p. 85
Cathodoluminescence (CL) of Porous GaN	p. 86
Photoluminescence (PL) of Porous GaN	p. 88
Raman Spectroscopy of Porous GaN	p. 89
Characteristics of Raman scattering in GaN	p. 89
Raman Spectra of Porous GaN Excited Below Band Gap	p. 91
Summary and Conclusions	p. 95
Acknowledgements	p. 95
References	p. 95
Growth of GaN on Porous SiC by Molecular Beam Epitaxy	p. 101
Introduction	p. 101
Morphology and Preparation of Porous SiC Substrates	p. 104
Porous Substrates	p. 104
Hydrogen Etching	p. 105
MBE Growth of GaN on Porous SiC Substrates	p. 108
Experimental Details	p. 108
Film Structure	p. 110
Film Strain	p. 114
Summary	p. 116
Acknowledgements	p. 117
References	p. 117
GaN Lateral Epitaxy Growth Using Porous SiN[subscript x], TiN[subscript x] and SiC	p. 121
Introduction	p. 121
Epitaxy of GaN on Porous SiN[subscript x] Network	p. 122
Three-step Growth Method	p. 123
Structural and Optical Characterization	p. 128
Schottky Diodes (SDs) on Undoped GaN Templates	p. 135
Deep Level Transition Spectrum	p. 138
Epitaxial Lateral Overgrowth of GaN on Porous TiN	p. 140
Formation of Porous TiN	p. 140
Growth of GaN on Porous TiN	p. 142
Characterization by XRD	p. 146
Characterization by TEM	p. 146
Characterization by PL	p. 152
Growth of GaN on Porous SiC	p. 154
Fabrication of Porous SiC	p. 156
GaN Growth on Hydrogen Polished Porous SiC	p. 157
GaN Growth on Chemical Mechanical Polished Porous SiC	p. 164
Acknowledgements	p. 167
References	p. 167
HVPE Growth of GaN on Porous SiC Substrates	p. 171
Introduction	p. 171
PSC Substrate Fabrication and Properties	p. 172
Formation of Various Types of SPSC Structure	p. 173
Dense Layer	p. 177
Monitoring of Anodization Process	p. 178
Vacancy Model of Primary Pore Formation	p. 183
Stability of SPSC Under Post-Anodization Treatment	p. 190
Epitaxial Growth of GaN Films on PSC Substrates	p. 195
The Growth and Its Effect on the Structure of the PSC Substrate	p. 195
Properties of the GaN Films Grown	p. 198
Summary	p. 206
References	p. 207
Dislocation Mechanisms in GaN Films Grown on Porous Substrates or Interlayers	p. 213
Introduction	p. 213
Extended Defects in Epitaxially Grown GaN Thin Layers	p. 214
Dislocation Mechanisms in Conventional Lateral Epitaxy Overgrowth of GaN	p. 217
Growth of GaN on Porous SiC Substrates	p. 220
Growth of GaN on Porous SiN and TiN Interlayers	p. 222
GaN Growth on a TiN Interlayer	p. 223
GaN Growth on a SiN Interlayer	p. 224
Summary	p. 226
Acknowledgements	p. 227
References	p. 227
Electrical Properties of Porous SiC	p. 231
Introduction	p. 231
Resistivity and Hall Effect	p. 232
Deep Level Transient Spectroscopy	p. 234
Fundamentals of DLTS	p. 234
Method of Solving the General Equation	p. 236
Sample Considerations	p. 237
Potential Energy Near a Pore	p. 238
DLTS Data and Analysis	p. 240
Acknowledgements	p. 243
References	p. 243
Magnetism of Doped GaN Nanostructures	p. 245
Introduction	p. 245
Mn-Doped GaN Crystal	p. 247
Mn-Doped GaN Thin Films	p. 248
Mn-Doped GaN (1120) Surface	p. 249
Mn-Doped GaN (1010) Surface	p. 252
Mn and C Codoped in GaN (1010) Surface	p. 257
Mn- and Cr-Doped GaN One-Dimensional Structures	p. 259
Mn-Doped GaN Nanowires	p. 259
Cr-Doped GaN Nanotubes	p. 262
Cr-Doped GaN Nanohole Arrays	p. 265
N-Doped Mn and Cr Clusters	p. 268
Giant Magnetic Moments of Mn[subscript x]N Clusters	p. 268
N-induced Magnetic Transition in Small Cr[subscript x]N Clusters	p. 269
Summary	p. 270
Acknowledgements	p. 271
References	p. 271
SiC Catalysis Technology	p. 275
Introduction	p. 275
Silicon Carbide Support	p. 276
Heat Effects During Reaction	p. 277
Reactions on SiC as Catalytic Supports	p. 278
Examples of SiC Catalyst Applications	p. 279
Pt/[beta]-SiC Catalyst for Catalytic Combustion of Carbon Particles in Diesel Engines	p. 279
Complete Oxidation of Methane	p. 280
SiC-Supported MoO[subscript 3]-Carbon-Modified Catalyst for the n-Heptane Isomerization	p. 280
Selective Oxidation of H[subscript 2]S Over SiC-Supported Iron Catalysts into Elemental Sulfur	p. 281
Partial Oxidation of n-Butane to Maleic Anhydride Using SiC-Mixed and Pd-Modified Vanadyl Pyrophosphate (VPO) Catalysts (Case study)	p. 282
Prospects and Conclusions	p. 288
References	p. 289
Nanoporous SiC as a Semi-Permeable Biomembrane for Medical Use: Practical and Theoretical Considerations	p. 291
The Rationale for Implantable Semi-Permeable Materials	p. 291
The Biology of Soluble Signaling Proteins in Tissue	p. 292
Measuring Cytokine Secretion In Living Tissues and Organs	p. 294
Creating a Biocompatible Tissue - Device Interface: Advantages of SiC	p. 295
The Testing of SiC Membranes for Permeability of Proteins	p. 296
Improving the Structure of SiC Membranes for Biosensor Interfaces	p. 299
Theoretical Considerations: Modeling Diffusion through a Porous Membrane	p. 301
Effective Medium Models for a Porous Membrane	p. 302
Comparison with Experiment	p. 304
Future Development: Marriage of Membrane and Microchip	p. 305
Conclusions	p. 307
Acknowledgements	p. 307
References	p. 308
Index	p. 311
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Porous Silicon Carbide and Gallium Nitride Epitaxy, Catalysis, and Biotechnology Applications

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Porous Silicon Carbide and Gallium Nitride Epitaxy, Catalysis, and Biotechnology Applications

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