Micro and Nanosystems

This volume focuses on (a) microsystems, including micromachines and microelectromechanical systems (MEMS), as well as micro-optical-electromechanical systems (MOEMS), and (b) nanosystems, also referred to as nanoelectromechanical systems (NEMS) or molecular machines, including devices that incorporate nanotubes, nanocantilevers, and molecular or atomic manipulators. A wide range of physical and chemical sensor applications have been addressed with these technologies and are outlined in the volume, including inertial, magnetic, environmental, chemical, and biological detection. The volume also provides an overall perspective on the technology required to leap from conventional micro- and nanosystems to bionanosystems, and to realize functional materials and systems for applications such as drug delivery. Additional highlights include a look at the application of focused ion beam milling in characterizing MEMS devices, which is becoming a conventional tool for this purpose. The electrodeposition of structures through high aspect ratio features in thick resists, which is a new and powerful trend in MEMS fabrication, is also examined. And surface and materials issues for reliability of MEMS devices are assessed and provide insight into how characterization schemes for evaluating MEMS reliability can be developed. Topics include: metrology and materials characterization; surfaces and interfaces; reliability and packaging; tribology; materials and mechanics; new materials and fabrication methodologies; RF and optical applications; micro- and nanofluidics; drug and protein delivery; actuators and BioMEMS; process and device modeling; materials and devices; MEMS and photonics; sensors and materials; nanosystems and devices; applied micro- and nanotechnology; self-assembled structures; and nanomaterials synthesis and applications.