Microelectromechanical Systems-materials and Devices III
, by Bagdahn, J”rg; Sheppard, Norman F., Jr.; Turner, Keviin T.; Vengallatore, SrikarNote: Supplemental materials are not guaranteed with Rental or Used book purchases.
- ISBN: 9781107408043 | 1107408040
- Cover: Paperback
- Copyright: 6/5/2014