Thin Film Micro-Optics

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ISBN: 9780444517463 | 0444517464
Cover: Hardcover
Copyright: 4/6/2007

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Thin Film Micro-Optics stands for novel types of micro-optical components and systems, which combine the well-known features of miniaturized optical elements with the specific advantages of thin optical layers. This approach allows for innovative solutions in shaping light fields in spatial, temporal and spectral domain. Low-dispersion and small-angle systems for tailoring and diagnosing laser pulses under extreme conditions as well as VUV-capable micro-optics can be realized utilizing Thin Film Micro-Optics. Continuous-relief micro-structures of refractive, reflective and hybrid characteristics are obtained by vapor deposition technologies with shadow masks in rotating systems.

Preface	p. vii
Acknowledgements	p. ix
List of Abbreviations	p. xvii
Introduction	p. 1
Micro-Optics	p. 3
The concept of microoptics	p. 3
Microoptics and macrooptics	p. 6
Scaling laws for a size reduction	p. 6
Diffraction and Fresnel number	p. 7
Types of microoptical components	p. 9
Refractive microoptics	p. 11
Specific properties of refractive microoptical components	p. 11
Gradient index lenses	p. 12
Spherical surface relief lenses	p. 13
Fresnel lenses	p. 17
Fabrication of refractive components	p. 18
Reflective microoptics	p. 19
Diffractive microoptics	p. 21
Hybrid microoptics	p. 23
Replication and structure transfer	p. 25
Specific properties of array structures	p. 26
Types and general features of microoptical array structures	p. 26
Fill factor, efficiency and symmetry	p. 27
Spatial frequencies and Fresnel numbers	p. 29
Cross-talk and self-imaging effects	p. 30
Wavefront detection with array components	p. 32
Gabor superlens	p. 34
Stacked and planar microoptics	p. 35
Problems and trends	p. 35
Thin-Film Optics	p. 39
The concept of thin-film optics	p. 39
Single transparent layer on substrates	p. 39
Uniform Fabry-Perot etalon at monochromatic illumination	p. 40
Fabry-Perot etalon of space-variant thickness at monochromatic illumination	p. 44
Fabry-Perot etalon of space-variant thickness at polychromatic illumination	p. 45
Transmission of ultrashort pulses through plane-parallel etalon structures	p. 47
Quarter-wave layers and half-wave layers at monochromatic illumination	p. 48
Admittance of absorbing layers at optical frequencies	p. 49
Dielectric multilayer structures	p. 51
The multilayer approach	p. 51
Method of characteristic matrices	p. 51
Dispersion management by layer stacks of adapted spectral phases	p. 53
Diffraction management by layer stacks of spatially variable reflectance	p. 54
Metal and metal-dielectric coatings	p. 56
Single reflecting metal layers	p. 56
Metal-dielectric layers as Gires-Tournois interferometer structures	p. 56
Problems and trends	p. 57
Thin-Film Microoptics	p. 59
The concept of thin-film microoptics	p. 59
Techniques for the fabrication of structured thin films: from macroscopic to microscopic scale	p. 60
Subtractive and modifying techniques	p. 60
Uniformity and nonuniformity of deposited layers	p. 61
Separately rotating masks for structured light exposure and vapor deposition	p. 62
Fixed thick shadow masks and extended sputtering sources	p. 63
Fixed thin circular shadow masks rotating with the substrate	p. 64
Thick shadow masks fixed at the substrates in a rotating system with point source	p. 64
Deposition of arrays of microoptical components with miniaturized shadow masks	p. 65
Simulation of the deposition through thick shadow masks fixed on a substrate in a system with planetary rotation	p. 67
Specific properties of thin-film microoptical components	p. 71
Specific advantages of thin-film deposition technique with shadow masks	p. 71
Specific advantages of thin-film microoptical design	p. 71
Thin-film microoptics on substrates: Specific properties and design constraints	p. 73
Contact angle and maximum angle of incidence of thin-film microlenses	p. 78
Types of thin-film microoptical components	p. 78
Fabrication of thin-film microoptics with shadow masks	p. 80
Vacuum deposition with planetary rotation and shadow masks	p. 80
Types of shadow masks for the deposition of thin-film microstructures	p. 81
Generation of arrays of high fill factors with the method of crossed deposition	p. 83
Wire-grid masks	p. 85
Deposition of nonspherical elements with slit and hole array masks of conical apertures	p. 88
Generation of arrays of high fill factors and parabolic profiles with mesh-shaped masks	p. 93
Pre-processing of polymer substrates for improving the adhesion of thin-film microoptics	p. 95
Multilayer and compound microoptics	p. 98
Multilayer microoptics	p. 98
Metal-dielectric structures	p. 99
Structure transfer of thin-film microoptical components by reactive ion etching	p. 103
Nanolayer microoptics	p. 105
VUV-capable transparent thin-film microoptics	p. 107
Problems and trends	p. 109
Characterization of Thin-Film Microoptics	p. 111
Specific measuring problems	p. 111
Interferometric characterization of thin-film microlens arrays	p. 112
Phase shift interferometer	p. 112
Characterization of shape distribution and periodicity of microlens arrays	p. 113
Optical functions of thin-film microlens arrays	p. 116
Reflectance mapping of multilayer microoptics	p. 119
Spatially resolved measurement of specular reflectance	p. 119
Spatial reflectance mapping with angular resolution	p. 123
Near field propagation measurements	p. 123
Spatial Beam Shaping with Thin-Film Microoptics	p. 125
Hybrid microoptics for improved efficiency of laser diode collimation	p. 125
Motivation and basic concepts	p. 125
Slow-axis collimation with compact systems of cylindrical microlenses	p. 128
Angular-adapted micro-gradient AR coatings	p. 130
Mode-selection in laser resonators	p. 133
Stability management of compact solid-state laser resonators with micro-mirrors	p. 133
Talbot resonators with micro-mirror arrays	p. 134
Mode stabilization in laser diode MOPA-systems with external resonator for second harmonic generation	p. 137
Generation of Bessel-like nondiffracting beams	p. 139
Nondiffracting beams	p. 139
Bessel-like beams	p. 141
Generation of arrays of microscopic Bessel-like beams with thin-film axicons	p. 143
Spatial self-reconstruction of Bessel-like beams	p. 146
Self-apodized truncation of Bessel beams as a first way to shape needle beams	p. 147
Ultraflat thin-film axicons of extremely small conical angles as a second way to generate needle beams	p. 152
Shack-Hartmann wavefront sensing at extreme laser parameters with Bessel-like beams	p. 155
Particular features of Shack-Hartmann sensors with Bessel-like nondiffracting beams	p. 155
Transmissive and reflective setups with angular-tolerant thin-film microaxicons	p. 157
VUV laser beam array generation and multichannel materials processing	p. 160
VUV beam array generation with thin-film microoptics	p. 160
Beam cleaning by absorption	p. 162
VUV materials processing with thin-film microoptics	p. 163
Spatio-Temporal Beam Shaping and Characterization of Ultrashort-Pulse Lasers	p. 167
Motivation	p. 167
Coherence mapping	p. 168
Microoptical approaches based on multichannel interferometry	p. 168
Coherence mapping with thin-film Fabry-Perot arrays	p. 171
Coherence mapping with arrays of Bessel-like beams	p. 172
Decoding of axial coherence information with arrays of Bessel-like beams	p. 176
Coherence mapping with the Talbot effect	p. 176
Spatio-temporal autocorrelation	p. 179
Processing and characterization of ultrashort optical pulses	p. 179
Concept of the collinear matrix autocorrelator based on arrays of Bessel-like beams	p. 180
Transversal autocorrelation information in Bessel-like beams	p. 182
Wavefront autocorrelation experiments	p. 183
Hyperspectral sensing of polychromatic wavefronts	p. 188
Prospects for a spatially-resolved spectral phase measurement	p. 188
Hyperspectral Shack-Hartmann wavefront sensor with graxicon arrays	p. 190
Generation of optical spatio-temporal X-pulses with thin-film structures	p. 193
X-waves and X-pulses as spectral interference phenomena in spatio-temporal domain	p. 193
Generation and direct detection of arrayed microscopic-size pulsed optical Bessel-like X-waves and single macroscopic Bessel-Gauss X-pulses	p. 194
Self-apodized truncation of ultrashort and ultrabroadband Bessel pulses	p. 196
Spatial propagation of ultrashort-pulsed and ultrabroadband truncated Bessel-like beams generated with thin-film beam shapers	p. 197
Spatio-spectral and spatio-temporal transfer of ultrashort-pulsed and ultrabroadband truncated Bessel-Gauss beams	p. 199
Comparison to ultrashort-pulsed Gaussian beams	p. 201
Spatio-temporal self-reconstruction and nondiffracting images	p. 202
Self-reconstruction and spatio-temporal information	p. 202
Nondiffracting images	p. 203
Outlook	p. 205
References	p. 207
Figure Credits	p. 253
Glossary	p. 255
Index	p. 279
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