Transmission Electron Microscopy in Micro-nanoelectronics
, by Claverie, AlainNote: Supplemental materials are not guaranteed with Rental or Used book purchases.
- ISBN: 9781848213678 | 1848213670
- Cover: Hardcover
- Copyright: 12/26/2012
This book presents in a simple and practical way the new quantitative techniques based on transmission electron microscopy which have been recently invented or developed to address most of the main challenging issues scientists and process engineers have to face to develop or optimize semiconductor layers and devices.