Transport in Laser Microfabrication: Fundamentals and Applications

Emphasizing the fundamentals of transport phenomena, this book provides researchers and practitioners with the technical background they need to understand laser-induced microfabrication and materials processing at small scales. It clarifies the laser/materials coupling mechanisms, and discusses the nanoscale confined laser interactions that constitute powerful tools for top-down nanomanufacturing. In addition to discussing key and emerging applications to modern technology, with particular respect to electronics, advanced topics such as the use of lasers for nanoprocessing and nanomachining, the interaction with polymer materials, nanoparticles and clusters, and the processing of thin films are also covered.

1. Fundamentals of laser energy absorption; 2. Lasers and optics; 3. Thermal processes in laser materials interactions; 4. Desorption at low laser energy densities; 5. Dynamics of laser ablation C. Grigoropoulos and S. Mao; 6. Ultra-fast laser interactions with materials C. Grigoropoulos and S. Mao; 7. Laser processing of thin semiconductor films; 8. Laser-induced surface modification; 9. Laser processing of organic materials S. Mao; 10. Pulsed laser interaction with liquids; 11. Laser cleaning of particulate contaminants; 12. Laser interactions with nanoparticles; 13. Laser-assisted microprocessing; 14. Nano-structuring using pulsed laser radiation.