A User's Guide to Ellipsometry

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ISBN: 9780126939507 | 0126939500
Cover: Hardcover
Copyright: 10/1/1992

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Summary

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Text for graduate students explains how to determine material properties and parameters for inaccessible substrates and unknown films as well as how to measure extremely thin films. 1993 edition.

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Preface
Theoretical Aspects	p. 1
Instrumentation	p. 19
Using Optical Parameters to Determine Material Properties	p. 35
Determining Optical Parameters for Inaccessible Substrates and Unknown Films	p. 51
Extremely Thin Films	p. 65
The Special Case of Polysilicon	p. 82
The Effect of Roughness	p. 95
Case Studies	p. 107
Dissolution and Swelling of Thin Polymer Films	p. 109
Ion Beam Interaction with Silicon	p. 119
Dry Oxidation of Metals	p. 127
Optical Properties of Sputtered Chromium Suboxide Thin Films	p. 135
Ion-Assisted Film Growth of Zirconium Dioxide	p. 139
Electrochemical/Ellipsometric Studies of Oxides on Metals	p. 142
Amorphous Hydrogenated Carbon Films	p. 160
Fluoropolymer Films on Silicon from Reactive Ion Etching	p. 168
Various Films on InP	p. 180
Benzotriazole and Benzimidazole on Copper	p. 186
Gas Adsorption on Metal Surfaces	p. 196
Silicon-Germanium Thin Films	p. 213
Profiling of HgCdTe	p. 217
Oxides and Nitrides of Silicon	p. 221
Appendices	p. 231
Appendix A: Del/Psi Trajectory Calculations	p. 233
Appendix B: Effective Medium Considerations	p. 246
Appendix C: Literature Values of Optical Constants of Various Materials	p. 253
Index	p. 257
Table of Contents provided by Blackwell. All Rights Reserved.

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A User's Guide to Ellipsometry

Summary

Table of Contents

Supplemental Materials