A User's Guide to Ellipsometry
, by Tompkins, Harland G.
- ISBN: 9780486450285 | 0486450287
- Cover: Paperback
- Copyright: 7/7/2006
This text on optics for graduate students explains how to determine material properties and parameters for inaccessible substrates and unknown films as well as how to measure extremely thin films. Fourteen case studies illustrate concepts and applications. Author Harland G. Tompkins is a Mesa, Arizona-based scientist associated with Motorola, Inc.
| Preface | x | ||||
| Chapter 1 Theoretical Aspects | 1 | (18) | |||
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1 | (1) | |||
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2 | (5) | |||
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7 | (3) | |||
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10 | (7) | |||
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17 | (1) | |||
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18 | (1) | |||
| Chapter 2 Instrumentation | 19 | (16) | |||
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19 | (2) | |||
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21 | (5) | |||
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26 | (4) | |||
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30 | (4) | |||
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34 | (1) | |||
| Chapter 3 Using Optical Parameters to Determine Material Properties | 35 | (16) | |||
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35 | (4) | |||
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39 | (1) | |||
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40 | (5) | |||
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45 | (2) | |||
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47 | (3) | |||
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50 | (1) | |||
| Chapter 4 Determining Optical Parameters for Inaccessible Substrates and Unknown Films | 51 | (14) | |||
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51 | (2) | |||
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53 | (5) | |||
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58 | (4) | |||
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62 | (1) | |||
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63 | (2) | |||
| Chapter 5 Extremely Thin Films | 65 | (17) | |||
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65 | (4) | |||
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69 | (11) | |||
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80 | (1) | |||
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80 | (2) | |||
| Chapter 6 The Special Case of Polysilicon | 82 | (13) | |||
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82 | (1) | |||
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82 | (4) | |||
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86 | (2) | |||
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88 | (1) | |||
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88 | (3) | |||
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94 | (1) | |||
| Chapter 7 The Effect of Roughness | 95 | (12) | |||
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95 | (1) | |||
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95 | (1) | |||
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96 | (1) | |||
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97 | (1) | |||
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97 | (5) | |||
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102 | (4) | |||
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106 | (1) | |||
| Case Studies | 107 | (124) | |||
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109 | (10) | |||
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109 | (1) | |||
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109 | (5) | |||
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114 | (1) | |||
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115 | (3) | |||
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119 | (8) | |||
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127 | (8) | |||
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139 | (3) | |||
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141 | (1) | |||
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142 | (18) | |||
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142 | (1) | |||
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142 | (3) | |||
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145 | (2) | |||
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147 | (3) | |||
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150 | (4) | |||
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154 | (2) | |||
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156 | (2) | |||
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158 | (2) | |||
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160 | (8) | |||
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160 | (1) | |||
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160 | (4) | |||
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164 | (3) | |||
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167 | (1) | |||
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168 | (12) | |||
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168 | (1) | |||
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168 | (4) | |||
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172 | (4) | |||
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176 | (1) | |||
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177 | (2) | |||
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179 | (1) | |||
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180 | (6) | |||
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180 | (1) | |||
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180 | (2) | |||
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182 | (1) | |||
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183 | (2) | |||
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185 | (1) | |||
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186 | (10) | |||
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186 | (1) | |||
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187 | (1) | |||
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188 | (6) | |||
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194 | (2) | |||
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196 | (17) | |||
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196 | (1) | |||
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196 | (4) | |||
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200 | (2) | |||
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202 | (5) | |||
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207 | (4) | |||
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211 | (2) | |||
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213 | (4) | |||
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213 | (1) | |||
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213 | (1) | |||
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213 | (3) | |||
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216 | (1) | |||
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217 | (4) | |||
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217 | (1) | |||
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217 | (1) | |||
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218 | (1) | |||
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219 | (1) | |||
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221 | (10) | |||
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221 | (1) | |||
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221 | (3) | |||
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224 | (2) | |||
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226 | (3) | |||
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229 | (2) | |||
| Appendices | 231 | (26) | |||
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233 | (13) | |||
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233 | (1) | |||
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234 | (1) | |||
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235 | (1) | |||
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235 | (11) | |||
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246 | (7) | |||
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246 | (1) | |||
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247 | (1) | |||
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248 | (3) | |||
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251 | (2) | |||
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253 | (4) | |||
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253 | (1) | |||
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253 | (2) | |||
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255 | (2) | |||
| Index | 257 |
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