Vacuum Ultraviolet Spectroscopy II

This volume is for practitioners, experimentalists, and graduate students in applied physics, particularly in the fields of atomic and molecular physics, who work with vacuum ultraviolet applications and are in need of choosing the best type of modern instrumentation. It provides first-hand knowledge of the state-of-the-art equipment sources and gives technical information on how to use it, along with a broad reference bibliography.

CONTRIBUTORS

xi

(2)

VOLUMES IN SERIES

xiii

1. Normal-Incidence Monochromators and Spectrometers

1

(20)

MASATO KOIKE

1.1 Concave Grating Monochromators and Spectrometers

1

(16)

1.2 Plane Grating Monochromators and Spectrometers

17

(2)

References

19

(2)

2. Grazing-Incidence Monochromators for Third-Generation Synchrotron Radiation Sources

21

(34)

H.A. PADMORE

M.R. HOWELLS

W.R. McKINNEY

2.1 Introduction

21

(2)

2.2 Grating Theory

23

(10)

2.3 Application of Aberration Theory to the Design of an Undulator-Based SGM

33

(10)

2.4 Focusing in Variable-Included-Angle Monochromators

43

(3)

2.5 Diffraction Efficiency

46

(1)

2.6 An Optimized Beam Line for Microscopy by Photoelectron Emission Microscopy and Micro-X-Ray Photoelectron Spectroscopy

47

(5)

References

52

(3)

3. Spectrographs and Monochromators Using Varied Line Spacing Gratings

55

(18)

JAMES H. UNDERWOOD

3.1 Limitations of Uniformly Spaced Grating Instruments

55

(1)

3.2 Paraxial Focusing Equations for VLS Gratings

56

(2)

3.3 Harada-Style Focusing

58

(2)

3.4 Hettrick-Style Focusing

60

(2)

3.5 Flat Field Spectrographs and Spectrometers

62

(3)

3.6 Light Path Function for a System of a Mirror and a VLS Grating

65

(1)

3.7 Monochromators for Synchrotron Radiation

66

(4)

3.8 Holographically Recorded Gratings

70

(1)

3.9 Conclusions

70

(1)

References

70

(3)

4. Interferometric Spectrometers

73

(34)

ANNE P. THORNE

MALCOLM R. HOWELLS

4.1 Introduction

73

(4)

4.2 Fabry-Perot Interferometry

77

(3)

4.3 Fourier Transform Spectrometry: Principle Features

80

(7)

4.4 Fourier Transform Spectrometry in Practice in the VUV

87

(6)

4.5 Spatially Heterodyned, Nonscanning Interferometers for FTS

93

(4)

4.6 All-Reflection FT Spectrometers

97

(2)

4.7 Soft X-Ray FTS by Grazing Reflection

99

(6)

References

105

(2)

5. Gas Detectors

107

(10)

J.B. WEST

5.1 Ionization Chambers

107

(5)

5.2 Proportional Counters

112

(3)

References

115

(2)

6. Photodiode Detectors

117

(22)

L.R. CANFIELD

6.1 Introduction

117

(1)

6.2 Radiometric Standards

118

(1)

6.3 Photodiode Types

119

(15)

6.4 Proper Use of Photodiodes in the VUV

134

(3)

References

137

(2)

7. Amplifying and position Sensitive Detectors

139

(38)

OSWALD H.W. SIEGMUND

7.1 Photon Detection

139

(9)

7.2 Amplifying Detectors

148

(14)

7.3 Position Sensing Techniques

162

(10)

References

172

(5)

8. Absolute Flux Measurements

177

(16)

S.V. BOBASHEV

8.1 Introduction

177

(1)

8.2 Primary Radiator Radiometry

178

(1)

8.3 Primary Detector Radiometry

179

(7)

8.4 Transfer Detector Standards for Absolute Flux Measurement

186

(3)

8.5 Conclusion

189

(1)

References

190

(3)

9. Vacuum Techniques

193

(12)

ROGER L. STOCKBAUER

9.1 Introduction

193

(1)

9.2 Design of the Vaccum Environment

193

(7)

9.3 Leak Detection

200

(2)

9.4 Optics Cleaning

202

(1)

References

203

(2)

10. Lithography

205

(20)

YULI VLADIMIRSKY

10.1 Integrated Circuit Fabrication and Lithographic Process

205

(1)

10.2 Photoresist in Lithography

206

(2)

10.3 Optical Lithography

208

(6)

10.4 X-Ray Lithography

214

(7)

References

221

(4)

11. X-Ray Spectromicroscopy

225

(38)

HARALD ADE

11.1 Introduction

225

(5)

11.2 X-Ray Spectromicroscopy Approaches

230

(9)

11.3 Applications

239

(17)

11.4 Discussion

256

(1)

11.5 Conclusions

257

(1)

References

258

(5)

12. Optical Spectroscopy in the VUV Region

263

(16)

MARSHALL L. GINTER

KOUICHI YOSHING

12.1 Introduction

263

(2)

12.2 Wavelength Measurements and Energy Levels

265

(5)

12.3 Intensity Measurements and Cross Sections

270

(5)

References

275

(4)

13. Soft X-Ray Fluorescence Spectroscopy

279

(22)

THOMAS A. CALLCOTT

13.1 Introduction

279

(3)

13.2 Characteristics of the Soft X-Ray Fluorescence Spectra of Solids

282

(11)

13.3 Instrumentation for SXF Spectroscopy

293

(4)

13.4 Survey of Recent SXF Spectroscopy Research

297

(1)

References

298

(3)

INDEX

301

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Vacuum Ultraviolet Spectroscopy II

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