ION Implantation Technology 2010: 18th International Conference on Ion Implantation Technology IIT 2010, Kyoto, Japan 6-11 June 2011

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ION Implantation Technology 2010: 18th International Conference on Ion Implantation Technology IIT 2010, Kyoto, Japan 6-11 June 2011 by Matsuo, Jiro; Kase, Masataka; Aoki, Takaaki; Seki, Toshio, 9780735408760
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  • ISBN: 9780735408760 | 0735408769
  • Cover: Hardcover
  • Copyright: 1/24/2011

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The proceedings of 18th International conference on Ion Implantation Technology (IIT2010) covers all aspect of ion implantation, from the fundamentals of ion-solid interactions to industrial applications of the latest implantation machines and device manufacturing.
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