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Microelectromechanical Systems - Materials ...

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ISBN: 9781107406834

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MEMS, BioMEMS and Bioelectronics-Materials ...

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ISBN: 9781605113920

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Microelectromechanical Systems - Materials ...

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ISBN: 9781605112763

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Materials Science of Microelectromechanical ...

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ISBN: 9781107413214

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