Materials Science of Microelectromechanical Systems Mems Devices
, by De Boer, Maarten P.; Heuer, Arthur H.; Jacobs, S. Joshua; Peeters, EricNote: Supplemental materials are not guaranteed with Rental or Used book purchases.
- ISBN: 9781107413214 | 1107413214
- Cover: Paperback
- Copyright: 6/5/2014