Materials Science of Microelectromechanical Systems (Mems) Devices III
, by Kahn, Harold; De Deboer, Maarten; Judy, Michael; Spearing, S. MarkNote: Supplemental materials are not guaranteed with Rental or Used book purchases.
- ISBN: 9781107412293 | 1107412293
- Cover: Paperback
- Copyright: 6/5/2014