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Reliability of MEMS Testing of Materials and ...

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ISBN: 9783527314942

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LIGA and its Applications

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ISBN: 9783527316984

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Carbon Nanotube Devices Properties, ...

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ISBN: 9783527317202

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System-level Modeling of Mems

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ISBN: 9783527319039

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Inkjet-based Micromanufacturing

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ISBN: 9783527319046

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Enabling Technology for MEMS and Nanodevices ...

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ISBN: 9783527334988

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Micro Process Engineering Fundamentals, ...

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ISBN: 9783527335008

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Reliability of MEMS Testing of Materials and ...

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ISBN: 9783527335015

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CMOS - MEMS

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ISBN: 9783527334995

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