Introduction to Microfabrication
, by Franssila, Sami
- ISBN: 9780470749838 | 0470749830
- Cover: Hardcover
- Copyright: 10/25/2010
This accessible text is now fully revised and updated, providing an overview of fabrication technologies and materials needed to realize modern microdevices. It demonstrates how common microfabrication principles can be applied in different applications, to create devices ranging from nanometer probe tips to meter scale solar cells, and a host of microelectronic, mechanical, optical and fluidic devices in between. Latest developments in wafer engineering, patterning, thin films, surface preparation and bonding are covered. This second edition includes: expanded sections on MEMS and microfluidics related fabrication issues new chapters on polymer and glass microprocessing, as well as serial processing techniques
Professor Sami Franssila, Helsinki University of Technology, Finland
Sami Franssila has taught courses on microfluidics, bioMEMs, microsystems, nanoscience, silicon microtechnology and thin-film technology at Helsinki University of Technology since 1998. He is group leader of the Microfabrication group at Micronova, the Centre for Micro and Nanotechnology which is run jointly by the VTT Technical Research Centre of Finland and Helsinki University of Technology.
Professor Franssila researches into micro- and nanofabrication for fluidic, chemical and biological devices, chemical microsystems and thin film technology.
He has authored or co-authored over 60 peer reviewed articles, 120 international conference papers and written one textbook Introduction to Microfabrication, published by John Wiley & Sons in 2004.
Sami Franssila has taught courses on microfluidics, bioMEMs, microsystems, nanoscience, silicon microtechnology and thin-film technology at Helsinki University of Technology since 1998. He is group leader of the Microfabrication group at Micronova, the Centre for Micro and Nanotechnology which is run jointly by the VTT Technical Research Centre of Finland and Helsinki University of Technology.
Professor Franssila researches into micro- and nanofabrication for fluidic, chemical and biological devices, chemical microsystems and thin film technology.
He has authored or co-authored over 60 peer reviewed articles, 120 international conference papers and written one textbook Introduction to Microfabrication, published by John Wiley & Sons in 2004.
Please wait while the item is added to your bag...
