Rapid Thermal Annealing/Chemical Vapor Deposition and Integrated Processing
, by Hodul, David; Gelpey, Jeffrey C.; Green, Martin L.; Seidel, Thomas E.Note: Supplemental materials are not guaranteed with Rental or Used book purchases.
- ISBN: 9781107410756 | 1107410754
- Cover: Paperback
- Copyright: 6/5/2014