Statistical Case Studies for Industrial

American industry is becoming more aware of the importance of applying statistical methods to improve its competitive edge in the world market. Examples of real industrial applications can serve as a major motivator for industries that want to increase their use of statistical methods. This book contains a broad selection of case studies written by professionals in the semiconductor industry that illustrate the use of statistical methods to improve manufacturing processes. These case studies offer engineers, scientists, technicians, and managers numerous examples of best-in-class practices by their peers. Because of the universal nature of statistical applications, the methods described here can be applied to a wide range of industries, including the chemical, biotechnology, automotive, steel, plastics, textile, and food industries.

Foreword
Preface
Acknowledgments
Introduction
Facts About SEMATECH
Sematech Qualification Plan
Gauge Studies
Introduction to Gauge Studies
Prometrix RS35e Gauge Study in Five Two-Level Factors and One Three-Level Factor
Calibration of an FTIR Spectrometer for Measuring Carbon
Revelation of a Microbalance Warm-Up Effect
GRR Methodology for Destructive Testing and Quantitative Assessment of Gauge Capability For One-Side Specifications
Passive Data Collection
Introduction to Passive Data Collection
Understanding the Nature of Variability in a Dry Etch Process
Virgin Versus Recycled Wafers for Furnace Qualification: Is the Expense Justified?
Identifying Sources of Variation in a Wafer Planarization Process
Factors Which Affect the Number of Aerosol Particles Released by Clean Room Operators
A Skip-Lot Sampling Plan Based on Variance Components for Photolithographic Registration Measurements
Sampling to Meet a Variance Specification: Clean Room Qualification
Snapshot: A Plot Showing Progress Through a Device Development Laboratory
Design of Experiments
Introduction To Design Of Experiments
Elimination of TiN Peeling During Exposure to CVD Tungsten Deposition Process Using Designed Experiments
Modeling a Uniformity Bulls-Eye Inversion
Using Fewer Wafers to Resolve Confounding in Screening Experiments
Planarization by Chemical Mechanical Polishing: A Rate and Uniformity Study
Use of Experimental Design to Optimize a Process for Etching Polycrystalline Silicon Gates
Optimization of a Wafer Stepper Alignment System Using Robust Design
Application of Semi-Empirical Model Building to the RTCVD of Polysilicon
Statistical Process Control
Introduction to Statistical Process Control
Removing Drift Effects When Calculating Control Limits
Implementation of a Statistical Process Control Capability Strategy in the Manufacture of Raw Printed Circuit Boards for Surface Mount Technology
Obtaining and Using Statistical Process Control Limits in the Semiconductor Industry
Equipment Reliability
Introduction to Equipment Reliability
Marathon Report for a Photolithography Exposure Tool
Experimentation for Equipment Reliability Improvement
How to Determine Component-Based Preventive Maintenance Plans
Comprehensive Case Study
Introduction to Comprehensive Case Study
Characterization of a Vertical Furnace Chemical Vapor Deposition (CVD) Silicon Nitride Process
Appendix: Introduction to Integrated Circuit Manufacturing
Glossary of Selected Statistical Terms
Index of Selected Statistical Terms
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Statistical Case Studies for Industrial Process Improvement

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