Materials, Technology and Reliability for Advanced Interconnects and Low-k Dielectrics
, by Oehrlein, G. S.; Maex, K.; Joo, Y. C.; Ogawa, S.; Wetzel, J. T.Note: Supplemental materials are not guaranteed with Rental or Used book purchases.
- ISBN: 9781107413153 | 110741315X
- Cover: Paperback
- Copyright: 6/5/2014