Materials, Technology and Reliability for Advanced Interconnects and Low-k Dielectrics

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Materials, Technology and Reliability for Advanced Interconnects and Low-k Dielectrics by Oehrlein, G. S.; Maex, K.; Joo, Y. C.; Ogawa, S.; Wetzel, J. T., 9781107413153
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  • ISBN: 9781107413153 | 110741315X
  • Cover: Paperback
  • Copyright: 6/5/2014

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